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Some of the next articles are maybe not open access.

Deep Reactive Ion Silicon Etching

2011
openaire   +1 more source

DRIE (Deep Reactive Ion Etching)

2008
openaire   +1 more source

DRIE (Deep Reactive Ion Etching)

2011
openaire   +1 more source

Reactive ion etching in micromechanics and micromachining

1993
openaire   +1 more source
nanotechnology
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ion
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