Results 341 to 350 of about 156,728 (358)
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Reactive Ion Etching of Aluminum/Silicon
Journal of The Electrochemical Society, 1983High resolution, reproducible dry etching of Al/Si can be achieved using and mixtures in a hexagonal cathode reactive ion etching system. The etch directionality is a function of the composition, the number of wafers in the reactor, and the d‐c self‐bias voltage. Increases in the concentration of etching species produced by raising the percentage of in
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Precise patterning of organic semiconductors by reactive ion etching
, 2020M. Höppner +3 more
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Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask
Journal of microelectromechanical systems, 2017A. Bagolini +5 more
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Apparatus and method for reactive ion etching
2017The invention relates to an apparatus for reactive ion etching of a substrate, comprising: a plasma etch zone including an etch gas supply and arranged with a plasma generating structure for igniting a plasma and comprising an electrode structure arranged to accelerate the etch plasma toward a substrate portion to have ions impinge on the surface of ...
Roozeboom, F. +5 more
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Inductively-coupled-plasma reactive ion etching of single-crystal β-Ga2O3
, 2017Liheng Zhang, A. Verma, H. Xing, D. Jena
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Reactive ion etching in microcircuit fabrication
Thin Solid Films, 1981G.C. Schwartz, P.M. Schaible
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Reactive Ion Etching of Copper Films
Journal of The Electrochemical Society, 1983P. M. Schaible, G. C. Schwartz
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Surface Modification of Absorbable Magnesium Stents by Reactive Ion Etching
Plasma chemistry and plasma processing, 2013E. Galvin +5 more
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A novel non-sequential hydrogen-pulsed deep reactive ion etching of silicon
, 2013M. Gharooni +5 more
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