Results 351 to 358 of about 156,728 (358)

Plasma and Reactive Ion Etching

2001
openaire   +2 more sources

Superhydrophobic silicon surfaces with micro-nano hierarchical structures via deep reactive ion etching and galvanic etching.

Journal of Colloid and Interface Science, 2011
Yang He, Chengyu Jiang, Hengxu Yin, Junjiao Chen, W. Yuan   +4 more
semanticscholar   +1 more source

Three-dimensional etching of silicon substrates using a modified deep reactive ion etching technique

, 2011
S. Azimi, A. Sandoughsaz, B. Amirsolaimani, J. Naghsh-Nilchi, S. Mohajerzadeh   +4 more
semanticscholar   +1 more source

Reactive ion etching of crystalline quartz

Thin Solid Films, 1981
B.G. Pantchev, P. Danesh
openaire   +2 more sources

Large-area multicrystalline silicon solar cell fabrication using reactive ion etching (RIE)

, 2011
J. Yoo, Gwonjong Yu, J. Yi
semanticscholar   +1 more source

Change in surface morphology of polytetrafluoroethylene by reactive ion etching

, 2011
Tomohiro Takahashi, Yukihiro Hirano, Yuya Takasawa, T. Gowa, Naoyuki Fukutake, A. Oshima, S. Tagawa, M. Washio   +7 more
semanticscholar   +1 more source

Deep reactive ion etching of fused silica using a single-coated soft mask layer for bio-analytical applications

, 2010
T. Ray, Haixin Zhu, D. Meldrum
semanticscholar   +1 more source

Study of SF6 and SF6/O2 plasmas in a hollow cathode reactive ion etching reactor using Langmuir probe and optical emission spectroscopy techniques

, 2010
R. Pessoa, L. L. Tezani, H. S. Maciel, G. Petraconi, M. Massi   +4 more
semanticscholar   +1 more source