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High-Precision Localization Algorithm for Target Symmetry Center in Image-Based Overlay Metrology. [PDF]

open access: yesMicromachines (Basel)
Liu W   +7 more
europepmc   +1 more source

Optical Fourier Surfaces for Integrated Photonics. [PDF]

open access: yesACS Nano
Petter D   +10 more
europepmc   +1 more source

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