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Surface Studies by Low-Energy Electron Diffraction and Reflection High-Energy-Electron Diffraction
2012In this chapter, we present the basic concepts of the low-energy electron diffraction (LEED) and reflection high-energy electron diffraction (RHEED) experiments. The main goal is to provide an overview of the exploitation of these instrumental methods for analyzing the surfaces of technologically important III–V compound semiconductors.
Janusz Sadowski+3 more
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A differential reflection high energy electron diffraction measurement system
Review of Scientific Instruments, 1991An economical, real-time differential reflection high energy electron diffraction (RHEED) measurement system which is effective in a high-noise environment is described. Two fiber optic cables sample the RHEED intensities from the phosphorescent screen in a molecular beam epitaxy (MBE) growth chamber.
T. P. Chin, C. W. Tu, C. E. Chang
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, 1985
Measurements of the time‐dependent intensity in reflection high‐energy electron diffraction during [100] growth of AlxGa1−x As on GaAs (normal interface) and of GaAs on AlxGa1−x As (inverted interface) are reported for such growth on static, dynamic, and
A. Madhukar+6 more
semanticscholar +1 more source
Measurements of the time‐dependent intensity in reflection high‐energy electron diffraction during [100] growth of AlxGa1−x As on GaAs (normal interface) and of GaAs on AlxGa1−x As (inverted interface) are reported for such growth on static, dynamic, and
A. Madhukar+6 more
semanticscholar +1 more source
, 1990
Microscopic distributions of growth rates on GaAs(001) layers next to (111)A and (111)B surfaces were measured in real time during molecular beam epitaxy growth by scanning microprobe reflection high‐energy electron diffraction.
M. Hata+3 more
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Microscopic distributions of growth rates on GaAs(001) layers next to (111)A and (111)B surfaces were measured in real time during molecular beam epitaxy growth by scanning microprobe reflection high‐energy electron diffraction.
M. Hata+3 more
semanticscholar +1 more source
An Introduction to Reflection High Energy Electron Diffraction
1988Reflection high energy electron diffraction (RHEED) uses electrons of energy from a few keV to ∼100 keV directed at low angles of incidence (0.01 to 0.1 rad) with respect to a surface. RHEED is a fairly old technique. There are several examples1,2 of its use in the 1930’s and it was extensively employed for corrosion studies and epitaxial growth in the
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, 1985
The critical role of the group V pressure in controlling the dynamic growth front morphology during molecular beam epitaxial growth of III‐V compounds is demonstrated via computer simulations based upon a configuration‐dependent reactive incorporation ...
A. Madhukar, S. Ghaisas
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The critical role of the group V pressure in controlling the dynamic growth front morphology during molecular beam epitaxial growth of III‐V compounds is demonstrated via computer simulations based upon a configuration‐dependent reactive incorporation ...
A. Madhukar, S. Ghaisas
semanticscholar +1 more source
, 1986
Layer‐by‐layer alternating surface reconstructions of Si(001) 2×1 and 1×2 have been observed for the first time using reflection high‐energy electron diffraction (RHEED) during molecular beam epitaxy. RHEED intensity oscillations of the specular beam and
T. Sakamoto, T. Kawamura, G. Hashiguchi
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Layer‐by‐layer alternating surface reconstructions of Si(001) 2×1 and 1×2 have been observed for the first time using reflection high‐energy electron diffraction (RHEED) during molecular beam epitaxy. RHEED intensity oscillations of the specular beam and
T. Sakamoto, T. Kawamura, G. Hashiguchi
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, 1987
Si(111) surface topography changes during Si molecular beam epitaxial growth were observed by reflection electron microscope images using microprobe reflection high‐energy electron diffraction (RHEED).
M. Ichikawa, T. Doi
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Si(111) surface topography changes during Si molecular beam epitaxial growth were observed by reflection electron microscope images using microprobe reflection high‐energy electron diffraction (RHEED).
M. Ichikawa, T. Doi
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New Tilting Mechanism of Electron Gun for Reflection High-Energy Electron Diffraction
Japanese Journal of Applied Physics, 1995A new type of mechanism for tilting a reflection high-energy electron diffraction (RHEED) gun has been designed and constructed, which enables us to change the glancing angle of the primary electron beam when the specimen surface is located not only at a fixed position but also is moved to other positions.
Toshihiro Ichikawa, Hisashi Oyama
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, 1990
Microscopic distribution of growth rates on mesa‐etched GaAs(001) wafers was measured in real time during molecular beam epitaxy growth by scanning microprobe reflection high‐energy electron diffraction.
M. Hata+3 more
semanticscholar +1 more source
Microscopic distribution of growth rates on mesa‐etched GaAs(001) wafers was measured in real time during molecular beam epitaxy growth by scanning microprobe reflection high‐energy electron diffraction.
M. Hata+3 more
semanticscholar +1 more source