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DÜNYADA VE TÜRKİYE’DE ORMANLAR VE ORMANCILIK

open access: yesForestist, 1982
Metin ÖZDÖNMEZ, Turhan İSTANBULLU
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High Responsivity ${\rm a\!-\!Si}_{\rm x}{\rm Ge}_{1-{\rm x}}{\rm O}_{\rm y}:{\rm H}$ Microbolometers

IEEE Sensors Journal, 2007
Microbolometers of a-Si0.15Ge0.85O.0.236:H were fabricated by radio frequency (RF) magnetron sputtering. A sandwich layer of silicon nitride-silicon germanium oxide-silicon nitride was used. Surface micromachining was used to fabricate the detectors into a suspended bridge structure.
Mukti M. Rana, Donald P. Butler
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