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GHz frequency ZnO/Si SAW device

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2008
The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was fabricated using classical UV photolithography. The thickness of the piezoelectric thin film was optimized and a specific interdigital transducer structure was used to generate ...
Laurent Le, Brizoual   +5 more
openaire   +2 more sources

SAW devices for consumer communication applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1993
An overview of surface acoustic wave (SAW) filter techniques available for different applications is given. Techniques for TV IF applications are outlined, and typical structures are presented. This is followed by a discussion of applications for SAW resonators.
Ruppel, Clemens C. W.   +11 more
openaire   +3 more sources

PERFORMANCE EVALUATION OF SAW DEVICES BY SIMULATION

International Journal of Modelling and Simulation, 2004
AbstractSurface acoustic wave (SAW) devices have been used since the early 1990s as critical components in many radio frequency (RF) transmitters and receivers due to their small size, efficient operation, and excellent performance characteristics. In today’s wireless applications, the number of passive SAW components used is on the increase.
Atashbar, M. Z.   +2 more
openaire   +2 more sources

Piezoelectric AlN film for SAW devices applications

1993 Proceedings IEEE Ultrasonics Symposium, 1993
Polycrystalline AlN films with the c-axis oriented normal to the substrate surface, were deposited by RF reactive diode magnetron sputtering on fused quartz, silicon and sapphire. The films were characterized as to their morphology, optic and acoustic characteristics.
CALIENDO, C   +3 more
openaire   +4 more sources

THIN-FILMS FOR SAW DEVICES

International Journal of High Speed Electronics and Systems, 2000
Thin-films play a significant role in surface acoustic wave (SAW) technology. Thin metal films are essential for the generation and detection of SAWs on piezoelectric subtrates, can provide for directional control, influence the velocity and propagation loss, and can be configured to produce a wide variety of time and frequency signal processing ...
openaire   +1 more source

Strain effects in SAW devices

Proceedings of the IEEE, 1976
An analytical model is developed to determine the velocity of surface acoustic waves in strained media. It is shown that, in addition to the variations in path length, the SAW propagation may depend significantly on the velocity change with strain.
A.L. Nalamwar, M. Epstein
openaire   +1 more source

History of SAW devices

Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165), 2002
This paper gives a historical account of the development of Rayleigh-wave, or surface acoustic wave (SAW), devices for applications in electronics. The subject was spurred on initially by the requirements of pulse compression radar, and became a practical reality with the planar interdigital transducer, dating from 1965.
openaire   +1 more source

New Piezoelectric Substrates for SAW Devices

International Journal of High Speed Electronics and Systems, 2000
Recent developments in single crystal piezoelectric materials have focused on the search for "ideal" materials with zero temperature coefficient of frequency orientations featuring jointly high piezoelectric coupling, high intrinsic Q, zero power flow angle, and minimized diffraction effects.
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SAW device application of diamond

Proceedings of 1995 Japan International Electronic Manufacturing Technology Symposium, 2002
Polycrystalline diamond has emerged as a very promising material for high frequency surface acoustic wave (SAW) devices because it has a highest acoustic wave velocity amongst all materials. Theoretical studies with various types of piezoelectric materials were also performed.
S. Shikata   +6 more
openaire   +1 more source

Frequency trimming of SAW devices

Proceedings of IEEE Ultrasonics Symposium ULTSYM-94, 1994
This paper describes a frequency trimming technique suitable for GHz band SAW devices. A frequency shift was obtained by forming grooves on the substrate surface using an RF reactive sputter etching technique. Because the center frequency of a SAW transducer in a GHz band is very sensitive to the groove depth, a precise control of the etched amount is ...
openaire   +1 more source

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