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Modeling for accurate dimensional scanning electron microscope metrology: then and now.
Scanning, 2011M. Postek, A. Vladár
semanticscholar +1 more source
Chemically sensitive structure-imaging with a scanning transmission electron microscope
Nature, 1988S. J. Pennycook, L. Boatner
semanticscholar +1 more source
Automated four-point probe measurement of nanowires inside a scanning electron microscope
IEEE International Conference on Automation Science and Engineering, 2010Changhai Ru+6 more
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Metrology in Scanning Electron Microscope
Microscopy and Microanalysis, 2007Michael A. Sutton, Na Li
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Scanning electron microscope observation of dislocations in semiconductor and metal materials.
Journal of Electron Microscopy, 2010N. Kuwano+3 more
semanticscholar +1 more source
Electron optics of multi-beam scanning electron microscope
, 2011A. Mohammadi-Gheidari, P. Kruit
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Wettability study using transmitted electrons in environmental scanning electron microscope
, 2010Z. Barkay
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Scanning reflection electron microscope
Journal of Scientific Instruments, 1962openaire +2 more sources