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An Electromagnetic Scanning Mirror Integrated With Blazed Grating and Angle Sensor for a Near Infrared Micro Spectrometer

open access: yesJournal of Micromechanics and Microengineering, 2017
Abstract This work presents an electromagnetic scanning mirror integrated with blazed grating and an angle sensor for a near infrared micro spectrometer. This device is fabricated on an aluminum coated 7.9° off-oriented (1 1 1) silicon substrate by utilizing the micro-electro-mechanical systems (MEMS) technology.
Zhiyu Wen
exaly   +3 more sources
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Low-Stray-Light Gratings Fabricated With Scanning Exposure Method Based on Lloyd’s Mirror for a High-Contrast Near-Eye Display in Augmented Reality

Applied Optics, 2022
The stray light of gratings lowers the image contrast of augmented reality display devices based on lightguide gratings. We propose to reduce the stray light of gratings fabricated with the scanning exposure method in a Lloyd’s mirror interferometer setup.
Chenlu XU
exaly   +3 more sources

Highly Reliable Electromagnetic MOEMS Scanning Grating Mirror Based on Folded Torsion Beam With Fillet Corners

Modern Physics Letters B, 2020
To overcome the problems of poor structural reliability, high driving voltage and small scanning angle, a novel electromagnetic MOEMS scanning grating mirror (SGM) with folded torsion beam is reported in this work. Compared with the conventional straight torsion beam, the folded torsion beam has better elastic torsion property and can effectively ...
Jie Huang, Hongjie Lei, Liang Chen
exaly   +2 more sources

Modeling and Simulation of Blazed Grating Based on MEMS Scanning Micro-Mirror for NIR Micro-Spectrometer

Proceedings of SPIE, 2015
Near infrared micro-spectrometer (NIRMS) as a vital detection equipment for various elements has been investigated over the last few years. Traditional MEMS NIRMS employs CCD array detectors for NIR spectrum collection and this leads to higher fabrication cost. In this paper, to ensure the higher diffraction efficiency as well as lower fabrication cost,
Hongjie Lei, Zhiyu Wen
exaly   +2 more sources

Oxide Confinement and High Contrast Grating Mirrors for Mid-Infrared VCSELs

Optical Materials Express, 2013
Frederic Genty   +2 more
exaly  

Cancer Diagnosis by Radioisotopic Scanning

Ca-A Cancer Journal for Clinicians, 1965
John T Galambos
exaly  

Transparent Electrochemical Gratings From a Patterned Bistable Silver Mirror

ACS Nano, 2017
Eunkyoung Kim, Minsu Han, Jongbeom Na
exaly  

Frequency of Surveillance Scanning in Pediatric Hodgkin Disease Can Safely Be Reduced

Ca-A Cancer Journal for Clinicians, 2012
Mary Kay Barton
exaly  

Post-Corrections of Image Distortions in a Scanning Grating-Based Spectral Line Imager

IEEE Photonics Technology Letters, 2013
Fook Siong Chau, Kelvin K L Cheo
exaly  

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