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Self-Aligned Hybrid Photonic Circuits

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Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning

Extreme Ultraviolet (EUV) Lithography IX, 2018
This paper assesses Self-Aligned Block (SAB) and Fully Self-Aligned Via (FSAV) approaches to patterning using a iN5 (imec node 5 nm) vehicle and Metal 2 Self-Aligned Quadruple Patterning. We analyze SAB printability in the lithography process using process optimization, and demonstrate the effect of SAB on patterning yield for a (8 M2 lines x 6 M1 ...
Juncker, Aurelie, Clark, William, Vincent, Benjamin, Franke, Joern-Holger, Halder, Sandip, Lazzarino, Frederic, Murdoch, Gayle   +6 more
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Self-Aligned Coupled Nanowire Transistor

ACS Nano, 2011
The integration of multiple functionalities into individual nanoelectronic components is increasingly explored as a means to step up computational power, or for advanced signal processing. Here, we report the fabrication of a coupled nanowire transistor, a device where two superimposed high-performance nanowire field-effect transistors capable of ...
T.S. Kulmala, A. Colli, A. Fasoli, A. Lombardo, S. Haque, A.C. Ferrari   +5 more
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Compact, self-aligned focusing schlieren system

Optics Letters, 2021
A novel, to the best of our knowledge, compact, self-aligned focusing schlieren system is presented that eliminates the need for a separate source grid and cutoff grid. A single grid element serves both to generate a projected source grid onto a retroreflective background and act as the cutoff grid for the reflected light.
Brett F. Bathel, Joshua M. Weisberger
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Self-Aligning Ruthenium Interconnects

2020 IEEE International Interconnect Technology Conference (IITC), 2020
This contribution shows self-aligning ruthenium interconnects. The underlying process is gas phase electrodeposition, which allows metallic particles to be deposited locally. This is performed with an adjustable airgap between the insulator and the deposited metallic structure. The size of the enclosed airgap can be adjusted directly.
Leslie Schlag, Richard Grau, Mobassar Hossain, Helene Nahrstedt, Nishchay Angel Isaac, Johannes Reiprich, Jorg Pezoldt, Heiko Otto Jacobs   +7 more
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Self-aligning centrifugal supports

Journal of Engineering Physics and Thermophysics, 2009
A brief review of the basic types of rotation-type supports has been given. The structures of self-aligning gasdynamic and hydrodynamic centrifugal supports have been described. A comparative computational analysis of their efficiency has been made; the advantage of the hydraulic support in realizing large-tonnage processes has been shown on the basis ...
S. M. Arinkin, L. P. Panasenko, E. V. Papok   +2 more
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Digital self-aligned focusing schlieren

Optics Letters
In this Letter, a digital self-aligned focusing schlieren (D-SAFS) system is introduced. This system uses a digital transparent micro liquid crystal display (μLCD), in combination with a linear polarizer, to act on the linear polarization state of light transmitted in both the forward and reverse directions, essentially acting as both the source and ...
Brett F. Bathel, Joshua M. Weisberger, Wayne E. Page, Elijah J. Lalonde, Stephen B. Jones   +4 more
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Comparison of self-aligned and non-self-aligned GaAs E/D MESFETs

IEEE Transactions on Electron Devices, 1989
The device characteristics and circuit performance of self-aligned GaAs E/D-MESFETs have been compared. The fabrication process for both devices is discussed. Electrical measurements across a 2-in wafer showed that an average self-aligned 40- mu m-wide, 1- mu m-long enhancement device has transconductance of 275+or-17 mS/mm, an intrinsic K-value of 16 ...
C.-F. Wan, H. Shichijo, W.A. White, R.D. Hudgens, D.L. Plumton   +4 more
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Multilevel Self-Aligned Microcontact Printing System

Langmuir, 2010
A multilevel microcontact printing (μCP) system that avoids the use of optical alignment and precision manipulation equipment is demonstrated. Most of the complexity is transferred to the poly(dimethylsiloxane) (PDMS) stamp itself by forming the features, a mechanical self-alignment mechanism, and an elastic membrane by wafer scale replica molding on a
K, Choonee, R R A, Syms
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Self-aligning optical measurement systems

Applied Optics, 1992
The paper discusses how to teach a system of neural networks to respond to the alignment clues used by a human operator in performing routine, initial alignments. A paradigm is proposed for automating the alignment of the components of optical measurement systems. The paradigm which was tested on a spatial filter has proved to be successful for optical
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