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P1E-6 Monitoring and Extracting Film Viscoelastic Properties Using SH-SAW
2007 IEEE Ultrasonics Symposium Proceedings, 2007The viscoelastic properties of a polymeric film, negative photoresist MaN 420, are monitored using a shear horizontal surface acoustic wave (SH-SAW) delay line device throughout the ultra violet (UV) light induced polymer crosslinking process. Viscoelastic constants c44 and eta44 are extracted using the measured S21 transmission response of the device ...
D. Gallimore +2 more
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Guided SH-SAW characterization of elasticity variations of mesoporous TiO
2010 IEEE Sensors, 2010A Tetelin +5 more
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Optical TE-TM mode conversion using SH-SAW in ZnO/Y-X LiNbO/sub 3/
K. Nakamura +2 more
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Development of shear-horizontal–surface-acoustic wave (SH-SAW) sensor for liquids
Jun Kondoh, Showko Shiokawa
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Ultra-Wideband SH-SAW Filters Using 30° Y-cut LiNbO3/SiO2/Poly-Si/Si Multilayered Substrates
Yang Chang +5 more
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US2000-30 / EMD2000-26 / CPM2000-41 / OME2000-36 端面反射SH-SAWを用いたセンサの特性
徹 宮崎, 敦史 斎藤, 徹 野村
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