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Method for deposition of silicon carbide and silicon carbide epitaxial wafer
2013openaire +2 more sources
SILICON CARBIDE POWDER AND METHOD FOR PREPARING SILICON CARBIDE
2015KIM GYU-MI, CHO NAM-TAE, RYU HAE-YOON
openaire +1 more source
Silicon carbide crystal and method of manufacturing silicon carbide crystal
2012openaire +3 more sources