Silicon nitride (SiNx) is a material with many applications and can be deposited with various deposition techniques. Series of SiNx films were deposited with HWCVD, RF PECVD, MW PECVD and LF PECVD.
Dekkers, H.F.W. +15 more
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Recent Progress in Nanophotonics for Green Energy, Medicine, Healthcare, and Optical Computing Applications. [PDF]
Halawa OM +4 more
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Nanophotonics in Molecular Imaging and Biomedicine: Diagnostics, Therapies, and Translational Challenges. [PDF]
Hassan YM, Wanas A, Ali AA, El-Sayed WM.
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Engineering electronic and plasmonic materials for novel photonic devices
In the last decade well known materials such as metals and silicon have emerged as new materials for photonic applications leading to the growth of two important fields: plasmonics and silicon photonics.
Lagonigro, Laura
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Demonstration of multiple-wavelength-band photonic integrated circuits using a silicon and silicon nitride 2.5D integration method. [PDF]
Fu M +12 more
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Tunable bound states in the continuum through hybridization of 1D and 2D metasurfaces. [PDF]
Kovalev F +3 more
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Sub-100 nm manipulation of blue light over a large field of view using Si nanolens array. [PDF]
Shi Z, Jiang W, Lu Y, Zhang W.
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Diffraction order-engineered polarization-dependent silicon nano-antennas metagrating for compact subtissue Mueller microscopy. [PDF]
Li Q, Li J, Chen G, Lin Z, Lu D, Deng X.
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