Results 131 to 140 of about 33,604 (269)

Plasma‐Sequence‐Engineered Atomic Layer Deposition of Ultra‐Thin SiNx for Enhanced Etching Resistance in Extreme Ultraviolet Pellicles

open access: yesAdvanced Materials Interfaces, EarlyView.
Plasma‐sequence‐engineered ALD (PSE‐ALD), based on sequential NH3 and N2 plasma pulses, enables ultrathin, dense SiNx films. ToF‐MS analysis confirms ligand removal via HCl evolution, while increased film density indicates network densification. The resulting SiNx coating provides robust protection of graphite under H2 plasma exposure.
Hye‐Young Kim   +7 more
wiley   +1 more source

Evolution of Materials and Device Stacks for HfO2‐Based Ferroelectric Memories

open access: yesAdvanced Materials Interfaces, EarlyView.
This review summarizes engineering strategies for HfO2 based ferroelectric memories with focus on FeCAP and FeFET structures. It describes how dopant design, stress effects, and interface engineering improve the bulk ferroelectric response. It further discusses how channel engineering supports reliable memory characteristics and scalable integration ...
Eunjin Kim, Jiyong Woo
wiley   +1 more source

One‐Step Fabrication of Highly Transparent Superhydrophobic Coatings Via Atmospheric Pressure Radio Frequency Plasma Deposition

open access: yesAdvanced Materials Interfaces, EarlyView.
Atmospheric‐pressure RF plasma deposition enables the fabrication of transparent, superhydrophobic coatings with anti‐reflective functionality. Process optimization yields high optical transmittance, robust environmental stability, and self‐cleaning properties.
Sultan S. Ussenkhan   +7 more
wiley   +1 more source

The Significance of Unifying Non-Integrated Information on Contaminated Land and Risks. [PDF]

open access: yesEnviron Manage
Brotherton J   +5 more
europepmc   +1 more source

Nanozymes at the Bio‐Nano Interface: From Synthesis, Defect Engineering, Catalytic Behavior in Biological Microenvironments, and Biosafety Implications

open access: yesAdvanced Materials Interfaces, EarlyView.
Nanozymes (NZs) have emerged as versatile artificial enzymes with tunable catalytic properties driven by atomic coordination, defect engineering, and surface chemistry. This review presents a bio–nano interface framework linking synthesis strategies, structural design, and catalytic behavior within complex biological microenvironments.
Karen Guadalupe Quintero‐Garrido   +6 more
wiley   +1 more source

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