Recent Advances in Plasma‐Enhanced Atomic Layer Etching for Next‐Generation Nanofabrication
Continued semiconductor miniaturization demands atomic‐scale patterning and ultralow surface roughness beyond the capabilities of conventional reactive ion etching. This review highlights advances in isotropic and anisotropic plasma‐enhanced atomic layer etching since 2020, covering fundamental mechanisms, applications across major semiconductor ...
Shih‐Nan Hsiao
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Enhancing geohazard-based natural hazards triggering technological accidents' preparedness: A policy framework in Indonesian context. [PDF]
Sakya AE +6 more
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The PTL–CL interface plays a decisive role in PEMWE performance by governing electron conduction, water supply, oxygen removal, catalyst utilization, and interfacial stability. This review summarizes interface‐related resistance sources, characterization methods, and engineering strategies, highlighting rational PTL–CL interface design for low‐cost ...
Aobo Wan, Zhengkai Tu
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The ParlLawSpeech Parliamentary Text Data Collection > 3 Million Parliamentary Bills, Laws, and Speeches from 8 Legislatures. [PDF]
Schwalbach J +4 more
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Cellulose Surface Modification Effects on Equilibrium and Non‐Equilibrium Wetting by Water
Molecular dynamics simulations of nanometer‐sized water droplets spreading on cellulose substrates show strong effects from surface chemistry on both equilibrium contact angles and spreading dynamics. ABSTRACT Chemical modification is an important route to tuning interactions between nanocellulose and its surrounding media. Specifically, it affects the
Jakob Wohlert, Lars Berglund
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Identification of Legal Barriers to the Rearing and Processing of Insects in the EU-Implications Based on a Case Study. [PDF]
Zięty JJ +4 more
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Recent Advances of Slip Sensors for Smart Robotics
This review summarizes recent progress in robotic slip sensors across mechanical, electrical, thermal, optical, magnetic, and acoustic mechanisms, offering a comprehensive reference for the selection of slip sensors in robotic applications. In addition, current challenges and emerging trends are identified to advance the development of robust, adaptive,
Xingyu Zhang +8 more
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Ecological harm and criminal thresholds: A pilot legal-ecological coding framework for environmental crime judgments. [PDF]
Morelle-Hungría E.
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Advanced Manufacturing of Composite‐Based Systems for Energy Applications
Advanced manufacturing enables the integration of polymers, ceramics, metal oxides, and composites into architected microstructures with tailored transport pathways. By coupling material selection, manufacturing strategy, and structural design, multifunctional energy systems can simultaneously improve electrochemical performance, thermal management ...
Sri Vaishnavi Thummalapalli +13 more
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A phosphogypsum inventory: Regulatory frameworks and research trends for sustainable management. [PDF]
Çelik E, Avşar Kaya C, Ertunç S.
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