Volume Hologram Formation in SU-8 Photoresist. [PDF]
Polymers (Basel), 2017 In order to further understand the mechanism of volume hologram formation in photosensitive polymers, light-induced material response is analyzed in commonly used epoxy-based negative photoresist Epon SU-8. For this purpose, time-resolved investigation of volume holographic grating growth is performed in the SU-8 based host–guest system and in the pure
Sabel T.
europepmc +9 more sources
SU-8 free-standing microfluidic probes. [PDF]
Biomicrofluidics, 2017 We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer.
Kim AA +6 more
europepmc +3 more sources
SU-8 based piezoresistive mechanical sensor [PDF]
Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266), 2003 We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that
J. Thaysen +6 more
openaire +4 more sources
Insight into the Propagation of Interface Acoustic Waves in Rotated YX-LiNbO3/SU-8/Si Structures [PDF]
MicromachinesThe propagation of interface acoustic waves (IAWs) along rotated YX-LiNbO3/SU-8/ZX-Si structures is theoretically investigated to identify the Y-rotation angles that support the efficient propagation of low-loss modes guided along the structure’s ...
Cinzia Caliendo +3 more
doaj +2 more sources
Microfluidic Long-Term Gradient Generator with Axon Separation Prototyped by 185 nm Diffused Light Photolithography of SU-8 Photoresist [PDF]
Micromachines, 2018 We have developed a cast microfluidic chip for concentration gradient generation that contains a thin (~5 µm2 cross-sectional area) microchannel. The diffusion of diffused 185 nm ultraviolet (UV) light from an inexpensive low-pressure mercury lamp ...
Nobuyuki Futai +3 more
doaj +2 more sources
Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist [PDF]
Micromachines, 2018 Thick SU-8 photoresist has been a popular photoresist material to fabricate various mechanical, biological, and chemical devices for many years. The accuracy and precision of the ultraviolet (UV) lithography process of thick SU-8 depend on key parameters
Zai-Fa Zhou, Qing-An Huang
doaj +2 more sources
Heterogeneous micro-architectonic integration of SU-8 and highly entangled polyacrylamide hydrogel to realize cut-resistant soft superhydrophobic surfaces. [PDF]
J Micromech MicroengCheng J, Liu TL.
europepmc +3 more sources
First Demonstration of Hysteresis-Free IGZO/SnO-Based Complementary Circuits and SRAM with Long-Term Reliability Using SU-8 Passivation. [PDF]
Nano ConvergHan C +7 more
europepmc +3 more sources
European Journal of Taxonomy, 2022 The impact of the late Devonian Hangenberg Event on ostracods is quantified for the first time from newly acquired data from the Blue Snake section, Guizhou Province, South China.
Elvis Guillam +3 more
doaj +1 more source
A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors [PDF]
Nano-Micro Letters, 2018 Ribu Mathew, Ravi Sankar A
exaly +2 more sources