Results 301 to 310 of about 345,165 (330)
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SU-8 SPIKE ELECTRODES FOR NEURAL SIGNALS
2011Electrodes are widely used to record biological signals from living tissue, namely in neuroscience where researchers need to record brain signals in vivo. This paper presents a rapid low-cost prototyping technology for protocol-specific electrode designs. The suggested fabrication process combines SU-8 photoresist patterning in multiple layers with the
Ribeiro, J. F. +7 more
openaire +2 more sources
Nanoimprinting with SU-8 epoxy resists
SPIE Proceedings, 2007This paper reports on the evaluation of XP SU-8 4000NPG for potential use in nanoimprint applications using hot UV imprint lithography. The use of this material is advantageous in that it can be imprinted, exposed and sufficiently cured all at the same temperature without any temperature cycling providing an isothermal process leading to short cycle ...
Donald W. Johnson +4 more
openaire +1 more source
Journal of Micromechanics and Microengineering, 2008
This paper summarizes the results of the process optimization for SU-8 films with thicknesses ≤5 µm. The influence of soft-bake conditions, exposure dose and post-exposure-bake parameters on residual film stress, structural stability and lithographic resolution was investigated.
Stephan Keller +4 more
openaire +1 more source
This paper summarizes the results of the process optimization for SU-8 films with thicknesses ≤5 µm. The influence of soft-bake conditions, exposure dose and post-exposure-bake parameters on residual film stress, structural stability and lithographic resolution was investigated.
Stephan Keller +4 more
openaire +1 more source
2018
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openaire +1 more source
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openaire +1 more source
Integrated humidity sensor based on SU-8 polymer microdisk microresonator
Sensors and Actuators B: Chemical, 2017Suman Anand
exaly

