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Process Technology and Industrial Processes
2010A quick review of the deposition methods that achieved sufficient low resistivities and comparison of these methods in terms of the capability for large area mass production will be made. At the later half our experience on two pilot runs by evaporation and magnetron sputtering machines will be described in detail.
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Process Technology -- Advanced Process and Integration Technology
2006 International Electron Devices Meeting, 2006openaire +1 more source