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1974
The performance of MOS circuits depends to a large extent upon the accuracy attainable in processing, that is, on technological and economic factors. Therefore it is important for a circuit designer to know the processing in sufficient detail that a reasonable compromise between different parameters may be reached. As the circuit designer must often be
J. T. Wallmark, L. G. Carlstedt
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The performance of MOS circuits depends to a large extent upon the accuracy attainable in processing, that is, on technological and economic factors. Therefore it is important for a circuit designer to know the processing in sufficient detail that a reasonable compromise between different parameters may be reached. As the circuit designer must often be
J. T. Wallmark, L. G. Carlstedt
openaire +1 more source
Process Technology and Industrial Processes
2010A quick review of the deposition methods that achieved sufficient low resistivities and comparison of these methods in terms of the capability for large area mass production will be made. At the later half our experience on two pilot runs by evaporation and magnetron sputtering machines will be described in detail.
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Process Technology -- Advanced Process and Integration Technology
2006 International Electron Devices Meeting, 2006openaire +1 more source