Results 41 to 50 of about 109 (96)

A novel fabrication process to realise a valveless micropump on a flexible substrate [PDF]

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013
This paper reports, for the first time, the design, fabrication and testing of a valveless micropump, entirely screen printed onto a flexible polyimide (Kapton) substrate by using sacrificial, polymer-structural and piezoelectric layers. The sacrificial layer, used to achieve a pump chamber and inlet/outlet channels, is thermally removed, analogous to ...
Wei, Yang, Torah, Russel, Yang, Kai, Beeby, Steve, Tudor, John   +4 more
openaire   +2 more sources

A simulation and experimental study of a valveless piezoelectric micropump based on the synthetic jet principle

Nanotechnology and Precision Engineering
A stacked piezoelectric micropump based on the synthetic jet principle with a size of 22 × 22 × 5 mm3 is designed and fabricated. Through theoretical and finite element method (FEM) analysis, the conditions for achieving a synthetic jet structure are ...
Wencheng Lv, Jiafeng Ni, Weipeng Xuan, Yixing Li, Xiwei Huang, Lingling Sun, Hao Jin, Shurong Dong, Jikui Luo   +8 more
doaj   +1 more source

Simulation of valveless micropump and mode analysis

CoRR, 2007
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)
W. P. Lan, J. S. Chang, K. C. Wu, Y. C. Shih   +3 more
openaire   +3 more sources

Abstracts of papers presented at the 1997 Pittsburgh Conference

, 1997
Journal of Analytical Methods in Chemistry, Volume 19, Issue 4, Page 91-131, 1997.
wiley   +1 more source

5028 A Valveless Micropump for Gases

The proceedings of the JSME annual meeting, 2006
HEISIG, Sven, MANZONI, Giulio, TAKANO, Takayuki, MIHARA, Takashi, MAEDA, Ryutaro   +4 more
openaire   +1 more source

Design and control of a valveless micropump

, 2020
openaire   +1 more source

Modeling, simulation, and fabrication of a PZT valveless micropump

, 2021
openaire   +2 more sources

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A Valveless Micropump for Bidirectional Applications

Sensors and Actuators A: Physical, 2007
Abstract This paper describes a new valveless micropump for bidirectional use. The micropump was fabricated by bonding a fluidic channel and a membrane actuator. The fluidic channel was etched on a glass substrate and the membrane actuator was made on a silicon wafer.
Min Soo Kim, Jong Won Choi
exaly   +2 more sources

Dynamic Optimization of Valveless Micropump

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011
For the first time, this paper reports on an effective topology optimization method to improve the output net flux for valveless micropumps. The micropump considered here is actuated by the vibration of membranes and can generate a net flow along the optimized rigid fluidic channel. The detailed layout of the micropump channel is optimized with respect
Jan G. Korvink
exaly   +3 more sources

Manufacture of Three-Dimensional Valveless Micropump

Journal of Materials Processing Technology, 2007
Abstract Up to the present, the manufacture of the micropump generally used MEMS processes to obtain micro scale channels. However, the geometry of the channels is usually 2.5D and the cost is relatively high due to the characteristics of the most micro fabrication techniques. In this research, we focused on manufacture of three-dimensional valveless
Yih-Lin Cheng
exaly   +3 more sources