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BWD-DETR: A Robust Framework for Bright-Field Wafer Defect Detection [PDF]

Sensors
Optical defect detection based on bright-field imaging is currently one of the most widely applied inspection techniques in wafer fabrication. However, particle defects on the surface of patterned wafers are often small in size.
Ruilou Zhang, Xiangji Guo, Yuankang Xu, Tianyu Zhang, Ming Ming   +4 more
doaj   +2 more sources

DAS-YOLOv13: Dual-Axis Attention and Feature Fusion Model for Wafer Surface Defect Detection [PDF]

Sensors
Wafer defects in semiconductor manufacturing can directly damage the physical structure and circuit integrity of wafers, leading to the functional failure of chips.
Jingzhe Zhang, Rui Sun, Bo Li, Dexin Kong, Dejin Zhao, Jianhai Zhang   +5 more
doaj   +2 more sources

Phase Measuring Deflectometry for Wafer Thin-Film Stress Mapping [PDF]

Sensors
Wafer-level thin-film stress measurement is essential for reliable semiconductor fabrication. However, existing techniques present limitations in practice.
Yang Gao, Xinjun Wan, Kunying Hsin, Jiaqing Tao, Zhuoyi Yin, Fujun Yang   +5 more
doaj   +2 more sources

Wafer-scale single-crystal hexagonal boron nitride monolayers on Cu (111) [PDF]

Nature, 2020
Ultrathin two-dimensional (2D) semiconducting layered materials offer great potential for extending Moore’s law of the number of transistors in an integrated circuit1.
Tse-An Chen, Chih-Piao Chuu, Chien-Chih Tseng, C. Wen, H. P. Wong, Shuangyuan Pan, Rongtan Li, Tzu-Ang Chao, W. Chueh, Yanfeng Zhang, Q. Fu, B. Yakobson, Wen‐Hao Chang, Lain‐Jong Li   +13 more
semanticscholar   +1 more source

Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry

Sensors, 2023
Nowadays, Predictive Maintenance is a mandatory tool to reduce the cost of production in the semiconductor industry. This paper considers as a case study a critical part of the electrochemical deposition system, namely, the four Pins that hold a wafer ...
Umberto Amato, Anestis Antoniadis, Italia De Feis, Domenico Fazio, Caterina Genua, Irène Gijbels, Donatella Granata, Antonino La Magna, Daniele Pagano, Gabriele Tochino, Patrizia Vasquez   +10 more
doaj   +1 more source

Emerging MoS2 Wafer-Scale Technique for Integrated Circuits

Nano-Micro Letters, 2023
As an outstanding representative of layered materials, molybdenum disulfide (MoS_2) has excellent physical properties, such as high carrier mobility, stability, and abundance on earth.
Zimeng Ye, Chaou C. Tan, Xiaolei Huang, Yi Ouyang, Lei Yang, Zegao Wang, Mengming Michael Dong   +6 more
semanticscholar   +1 more source

Review of Wafer Surface Defect Detection Methods

Electronics, 2023
Wafer surface defect detection plays an important role in controlling product quality in semiconductor manufacturing, which has become a research hotspot in computer vision.
Jianhong Ma, T. Zhang, Cong Yang, Yangjie Cao, Lipeng Xie, Hui Tian, Xuexiang Li   +6 more
semanticscholar   +1 more source

Fast movement strategies for a step-and-scan wafer stepper [PDF]

, 1997
We describe algorithms for the determination of fast movement strategies for a step-and-scan wafer stepper, a device that is used for the photolithographic processing of integrated circuits. The proposed solution strategy consists of two parts. First, we
Hurkens, C.A.J., Kuijpers, C.M.H., Melissen, J.B.M.   +2 more
core   +19 more sources

Wafer-scale single-crystal monolayer graphene grown on sapphire substrate

Nature Materials, 2022
The growth of inch-scale high-quality graphene on insulating substrates is desirable for electronic and optoelectronic applications, but remains challenging due to the lack of metal catalysis. Here we demonstrate the wafer-scale synthesis of adlayer-free
Junzhu Li, Mingguang Chen, Abdus Samad, Haocong Dong, Avijeet Ray, Junwei Zhang, Xiaochuan Jiang, U. Schwingenschlögl, J. Domke, Cailing Chen, Yu Han, T. Fritz, R. Ruoff, Bo Tian, Xi-xiang Zhang   +14 more
semanticscholar   +1 more source

Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition

Functional Diamond, 2022
Aiming at developing inch-sized processing of diamond, B-doped layer was grown on mosaic single-crystallin diamond wafers by using hot-filament chemical vapor deposition (CVD), which is expected to have an advantage in terms of the deposition area ...
Hideaki Yamada, Takehiro Shimaoka
doaj   +1 more source