Results 151 to 160 of about 436,378 (230)

A Silicon Resonant Pressure Microsensor Based on Frequency-Ratio Measurement for High-Temperature Applications. [PDF]

Micromachines (Basel)
Tan Z, Ye P, Liu X, Xie B, Lu Y, Chen D, Wang J.   +6 more
europepmc   +1 more source

Wafer-scale high-κ HfO₂ dielectric films with sub-5-Å equivalent oxide thickness for 2D MoS₂ transistors. [PDF]

Nat Commun
Zhang S, Zhang T, Yu H, Li T, Li X, Cui C, Zhou Y, Guo H, Wang S, Zheng D, Huang L, Bai L, Liu S, Shen C, Yang W, Du L, Shi D, Xian L, Tao X, Chai Y, Li N, Zhang G.   +21 more
europepmc   +1 more source

Self-aligned and self-limiting van der Waals epitaxy of monolayer MoS₂ for scalable 2D electronics. [PDF]

Nat Commun
Sakuma Y, Atsumi K, Hiroto T, Nara J, Ohtake A, Ono Y, Matsumoto T, Muta Y, Takeda K, Kano E, Yasuno T, Yang X, Ikarashi N, Suzuki A, Ikezawa M, Li S, Nishimura T, Kanahashi K, Nagashio K.   +18 more
europepmc   +1 more source

Wafer Scale III-Nitride Deep-Ultraviolet Vertical-Cavity Surface-Emitting Lasers Featuring Nanometer-Class Control of Cavity Length. [PDF]

Adv Sci (Weinh)
Ji C, Wang J, Xu F, Zhang L, Lang J, Zhang Z, Tan F, Ji C, Zhang J, Zhang E, Kang X, Qin Z, Ju G, Wu J, Yang X, Tang N, Wang X, Ge W, Shen B.   +18 more
europepmc   +1 more source

Experimental Study on the Role of Bond Elasticity and Wafer Toughness in Back Grinding of Single-Crystal Wafers. [PDF]

Materials (Basel)
Yun JC, Lim DS.
europepmc   +1 more source

Comprehensive Structural and Interfacial Characterization of Laser-Sliced SiC Wafers. [PDF]

Materials (Basel)
Chen H, Lee S, Kang M, Youn HS, Go S, Kang E, Cho CR.   +6 more
europepmc   +1 more source

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Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

IEEE transactions on industrial electronics (1982. Print), 2022
Accurate pattern transfer in wafer scanners necessitates the wafer stage and the reticle stage executing a coordinated motion with the synchronization error in terms of nanometers.
Fazhi Song, Yang Liu, D. Shen, Li Li, Jiubin Tan   +4 more
semanticscholar   +1 more source