Results 91 to 100 of about 113,972 (245)
An optical-heterodyne alignment technique for quarter-micron x-ray lithography [PDF]
, 1989 Masanori Suzuki, Atsunobu Une
openalex +1 more source
Micro and Nano Engineering, 2021 High electron mobility transistors (HEMTs) are the basic building block in microwave monolithic integration circuits (MMICs) for broad applications in micrometer (0.3–100 GHz), millimeter (100–300 GHz) and tera [1] hertz (300 GHz–10 THz) wave.
Mingsai Zhu +3 more
doaj
An electron Talbot interferometer
, 2008 The Talbot effect, in which a wave imprinted with transverse periodicity reconstructs itself at regular intervals, is a diffraction phenomenon that occurs in many physical systems.
Alexander D Cronin +8 more
core +1 more source
X-Ray Lithography of Metal and Semiconductor Nanoparticles [PDF]
, 2008 In the last few years, a considerable amount of research has focused on the three-dimensional fabrication of contacts and electronic devices. Most techniques, however, are essentially based on photoreduction, and are limited to noble- and semi-noble ...
Bertino, Massimo F. +8 more
core +1 more source
Layout Decomposition for Quadruple Patterning Lithography and Beyond [PDF]
arXiv, 2014 For next-generation technology nodes, multiple patterning lithography (MPL) has emerged as a key solution, e.g., triple patterning lithography (TPL) for 14/11nm, and quadruple patterning lithography (QPL) for sub-10nm. In this paper, we propose a generic and robust layout decomposition framework for QPL, which can be further extended to handle any ...
arxiv
Advances in Mechanical Engineering, 2014 A high precision slit in ultra-high vacuum is designed to develop a good performance soft X-ray interference lithography (XIL) beamline at Shanghai Synchrotron Radiation Facility (SSRF). In order to define the secondary source and enhance the performance
Xuepeng Gong, Qipeng Lu, Zhongqi Peng
doaj +1 more source
X ray microscope assembly and alignment support and advanced x ray microscope design and analysis [PDF]
Considerable efforts have been devoted recently to the design, analysis, fabrication, and testing of spherical Schwarzschild microscopes for soft x ray application in microscopy and projection lithography.
Shealy, David L.
core +1 more source
Research on X-ray lithography by synchrotron radiation [PDF]
, 2003 制度:新 ; 文部省報告番号:乙1767号 ; 学位の種類:博士(工学) ; 授与年月日:2003/3/6 ; 早大学位記番号 ...
豊田 英二郎
core +1 more source
50-nm x-ray lithography using synchrotron radiation [PDF]
, 1994 Y. Chen +6 more
openalex +1 more source
Tapering enhanced stimulated superradiant amplification
New Journal of Physics, 2015 High conversion efficiency between electrical and optical power is highly desirable both for high peak and high average power radiation sources. In this paper we discuss a new mechanism based on stimulated superradiant emission in a strongly tapered ...
J Duris, A Murokh, P Musumeci
doaj +1 more source