Results 121 to 130 of about 113,972 (245)

A vertical x-ray stepper for SOR lithography.

open access: bronze, 1991
Sunao Ishihara   +5 more
openalex   +2 more sources

Performance of a compact beamline with high brightness for x-ray lithography [PDF]

open access: bronze, 2000
Sayumi Hirose   +6 more
openalex   +1 more source

High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography [PDF]

open access: green, 2003
Luca Businaro   +8 more
openalex   +1 more source

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