Results 181 to 190 of about 53,277 (339)

Ultra-deep x-ray lithography of densely packed SU-8 features: II. Process performance as a function of dose, feature height and post exposure bake temperature [PDF]

, 2005
Charles Becnel, Yohannes M. Desta, Kevin W. Kelly   +2 more
openalex   +1 more source

Ultrathin Monatomic Antimony Films by Sacrificial Atomic Layer Deposition for Phase Change Memory

Advanced Materials, EarlyView.
A three‐step sacrificial atomic layer deposition (s‐ALD) process enables wafer‐scale growth of ultrathin and uniform antimony (Sb) thin films. An ultrathin (≈4 nm) Sb film is uniformly deposited with its characteristic bilayer structure (Sb‐Sb) aligned along the substrate.
Gwangsik Jeon, Sangmin Jeon, Seunghwan Lee, Jeong Woo Jeon, Wonho Choi, Byongwoo Park, Sungjin Kim, Chanyoung Yoo, Hyejin Jang, Cheol Seong Hwang   +9 more
wiley   +1 more source

Rapid Nanocellulose Wet Nanoimprint Lithography for Tunable Structural Color. [PDF]

ACS Nano
Mao H, Ahmad Z, Xin L, Lama H, Fan P, Shields P, Eyley S, Thielemans W, Cabral JT.   +8 more
europepmc   +1 more source

Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks [PDF]

, 2020
Min Tu, Benzheng Xia, Dmitry E. Kravchenko, Max L. Tietze, Alexander John Cruz, Ivo Stassen, Tom Hauffman, Joan Teyssandier, Steven De Feyter, Zheng Wang, Roland A. Fischer, Benedetta Marmiroli, Heinz Amenitsch, Ana Torvisco, Miriam de J. Velásquez‐Hernández, Paolo Falcaro, Rob Ameloot   +16 more
openalex   +1 more source

High‐κ Perovskite‐Like Ternary Niobium Oxide Dielectrics for 2D Electronics

Advanced Materials, EarlyView.
High‐κ dielectrics are vital for scaled electronics. Here, a family of 2D high‐κ perovskite‐like ternary niobium oxides is synthesized via a molten salt‐assisted method. Their integration into FETs and logic gates reveals superior switching characteristics, providing a fresh material platform and new insights for the advancement of high‐performance 2D ...
Biao Zhang, Jianmiao Guo, Jianmin Yan, Jialiang Wang, Chao Yun, Guang Zeng, Jie Li, Cong Wang, Zhengdao Xie, Yanglong Hou, Yang Chai   +10 more
wiley   +1 more source

Inverse Lithography Technology (ILT) Under Chip Manufacture Context. [PDF]

Micromachines (Basel)
Meng X, Chen C, Ni J.
europepmc   +1 more source

A New Deep X-Ray Lithography Beamline at DELTA

, 2011
Daniela Lietz
openalex   +1 more source

Multi‐scale Engineered Vasculature and Hierarchical Porosity via Volumetric Bioprinting‐Guided Photopolymerization‐Induced Phase Separation

Advanced Materials, EarlyView.
Vascularization in bioprinted hydrogels is limited by nanoscale porosity in hydrogel bionks. Volumetric bioprinting of gelatin–norbornene phase‐separating hydrogels permits to create centimeter‐scale constructs featuring interconnected multi‐scale porosity. Light dose gradients result in spatially controlled pore dimensions. Capillary‐scale vessels are
Oksana Y. Dudaryeva, Maj‐Britt Buchholz, Gabriel Größbacher, Sofia Amaral, Sammy Florczak, Camille Bonhomme, Alvaro Rojo Ferrer, Mark W. Tibbitt, Riccardo Levato   +8 more
wiley   +1 more source

Patterning Fidelity Enhancement and Aberration Mitigation in EUV Lithography Through Source-Mask Optimization. [PDF]

Micromachines (Basel)
Wang Q, Wu Q, Li Y, Liu X, Li Y.
europepmc   +1 more source

Report of the fifth workshop on synchrotron x-ray lithography

, 1989
Gwyn Williams, Jules B. Godel, G. S. Brown, W. Liebmann   +3 more
openalex   +1 more source