Results 231 to 240 of about 1,917,345 (274)

Circular Polarimetric Imaging with a Metamaterial Integrated Long‐Wavelength Infrared Focal Plane Array

Advanced Science, EarlyView.
A quantum well infrared photodetector based long‐wavelength infrared division‐of‐focal‐plane‐array circular polarimeter featuring a 320 × 256 pixel array integrated with a chiral meta‐mirror structure array is established. The device achieves a circular polarization extinction ratio of 5.67, a 9.13‐fold enhancement in responsivity, a noise equivalent ...
Tianyun Zhu, Ling Wang, Wenji Jing, Jie Deng, Jiexian Ye, Yujie Zhang, Zeshi Chu, Jing Zhou, Xiaoshuang Chen, Xiangyang Li, Wei Lu, Xuechu Shen   +11 more
wiley   +1 more source

Zirconium‐Rich Strategy in Ultrathin Hf0.5Zr0.5O2 toward Back‐End‐of‐Line‐Compatible Ferroelectric Random Access Memory

Advanced Science, EarlyView.
Here, the zirconium‐rich layer (Zr‐RL) strategy is developed in terms of ferroelectric (FE) properties, microstructure, switching kinetics, and reliability. Compared to the FE capacitor with conventional HZO film, the sub‐6 nm HZO/Zr‐RL/HZO stack exhibits a significantly low annealing temperature, an ultra‐low Vop, and an excellent ferroelectricity ...
Yinchi Liu, Jiajia Tao, Xiaoyu Dou, Kangli Xu, Yuchun Li, Handong Zhu, Hongliang Lu, Yanxi Li, Chi Liu, Jiezhi Chen, Lin Chen, Shijin Ding, Jixuan Wu, Wenjun Liu   +13 more
wiley   +1 more source

Water‐Immersed GaP Huygens’ Meta‐Optics for Visible Structured Light Generation

Advanced Science, EarlyView.
Ultrathin GaP Huygens’ metasurfaces operating in the visible regime generate structured light beams underwater, including focusing Gaussian beams, abruptly autofocusing beams, Bessel beams, and optical vortices. The platform offers enhanced fabrication tolerance and mechanical stability, establishing a robust route toward compact underwater ...
Jia‐Hua Lee, Hsing‐Yi Wang, Pei Ying Ho, Yu Chia Chung, Ruei‐Tzu Duh, Cheng‐Ching Chiang, Ray‐Hua Horng, Yao‐Wei Huang, Ming Lun Tseng   +8 more
wiley   +1 more source

Ferroelectric Compensation Effect of the Hard Electrode for the HfO2‐ZrO2 Superlattice Films at the Low‐Annealing Temperature

Advanced Electronic Materials, EarlyView.
The hafnia superlattice structure ferroelectric capacitors are clamped by electrodes with various hardness and annealed at 450 to 600 °C. It is found that the out‐of‐plane compressive stress caused by electrode hardness can offset the in‐plane tensile stress loss in hafnium‐based superlattice ferroelectric devices when the annealing temperature ...
Chuqian Zhu, Na Bai, Yufan Wang, Huajun Sun, Lanqing Zou, Yunhui Yi, Jiyang Xu, Jiawang Ren, Junming Zhang, Sheng Hu, Kanhao Xue, Lei Ye, Weiming Cheng, Qiang He, Xiangshui Miao   +14 more
wiley   +1 more source

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Top-down patterning of zeolitic imidazolate framework composite thin films by deep X-ray lithography.

Chemical Communications, 2012
For the first time a top-down process was used to control the spatial location of Metal-Organic Frameworks on a surface. Deep X-ray lithography was utilised to micropattern a Zeolitic Imidazolate Framework layer on a sol-gel surface, with exposure ...
Constantinos Dimitrakakis, B. Marmiroli, H. Amenitsch, L. Malfatti, P. Innocenzi, G. Grenci, L. Vaccari, A. Hill, B. Ladewig, M. Hill, P. Falcaro   +10 more
semanticscholar   +1 more source

Simultaneous microfabrication and tuning of the permselective properties in microporous polymers using X-ray lithography.

Small, 2013
Microchannels are fabricated using a photosensitive polymer to which microporosity is tuned with different X-ray doses. Using hard X-ray irradiation, the micropattern is positioned with various geometries in a multi-level, three-dimensional structure ...
S. Han, C. Doherty, B. Marmiroli, H. Jo, D. Buso, A. Patelli, P. Schiavuta, P. Innocenzi, Y. Lee, Aaron W. Thornton, A. Hill, P. Falcaro   +11 more
semanticscholar   +1 more source

X‐ray lithography

, 1985
X‐ray lithography with wavelengths between 0.2 and 5 nm provides both high‐structural resolution as good as 0.1 μm and a wide scope of advantages for the application in circuit production.
A. Heuberger
semanticscholar   +1 more source

Direct nano-in-micropatterning of TiO2 thin layers and TiO2/Pt nanoelectrode arrays by deep X-ray lithography

, 2011
Nano-in-micro-patterned heterogeneous substrates and Pt electrodes are prepared via organic/inorganic self-assembly combined with deep X-ray lithography.
M. Faustini, B. Marmiroli, L. Malfatti, Benjamin Louis, N. Krins, P. Falcaro, G. Grenci, C. Laberty‐Robert, H. Amenitsch, P. Innocenzi, D. Grosso   +10 more
semanticscholar   +1 more source

Application of synchrotron radiation to x‐ray lithography

, 1976
Synchrotron radiation from the German electron synchrotron DESY in Hamburg has been used for x‐ray lithography. Replications of different master patterns (for magnetic bubble devices, Fresnel zone plates, etc.) were made using various wavelengths and ...
E. Spiller, D. Eastman, R. Feder, W. Grobman, W. Gudat, J. Topalian   +5 more
semanticscholar   +1 more source

Microfabrication of mesoporous silica encapsulated enzymes using deep X-ray lithography

, 2012
A bottom-up enzyme encapsulation technique on mesoporous silica together with top-down deep X-ray lithography provides a novel fabrication method for producing bioactive mesoporous patterned substrates for potential use as a biosensing platform.
C. Doherty, Yuan Gao, B. Marmiroli, H. Amenitsch, Fabio Lisi, L. Malfatti, K. Okada, Masahide Takahashi, A. Hill, P. Innocenzi, P. Falcaro   +10 more
semanticscholar   +1 more source