Results 251 to 260 of about 1,917,345 (274)

Evaluation of the gas puff z pinch as an x‐ray lithography and microscopy source

, 1982
Soft x rays (100–10 000 eV), due to their short wavelength (0.1–10 nm) can play an important role in high resolution microscopy and lithography. The gas puff Z pinch is an intense source of soft x rays.
J. Bailey, Y. Ettinger, A. Fisher, R. Feder   +3 more
semanticscholar   +1 more source

Optimization of laser writer-based UV lithography with high magnification optics to pattern X-ray lithography mask templates

Microsystem Technologies, 2018
S. Achenbach, S. Hengsbach, J. Schulz, J. Mohr   +3 more
semanticscholar   +1 more source

Maskless X-Ray Lithography Based on Microoptical Electromechanical Systems and Microfocus X-Ray Tubes

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques, 2018
N. Salashchenko, N. Chkhalo, N. A. Dyuzhev   +2 more
semanticscholar   +1 more source

Multibeam X-ray lithography to form deep regular microstructures

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques, 2016
B. Goldenberg, A. Lemzyakov, A. Zelinsky, V. Nazmov, V. Pindyurin   +4 more
semanticscholar   +1 more source

X-ray lithography

, 2016
J. Maldonado, M. Peckerar
semanticscholar   +1 more source

Characterization method for new resist formulations for HAR patterns made by X-ray lithography

, 2014
D. Kunka, J. Mohr, V. Nazmov, J. Meiser, P. Meyer, M. Amberger, F. Koch, J. Schulz, M. Walter, T. Duttenhofer, A. Voigt, G. Ahrens, G. Grützner   +12 more
semanticscholar   +1 more source

Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process

, 2014
Pongsak Kerdlapee, A. Wisitsoraat, Ditsayuth Phokaratkul, K. Leksakul, R. Phatthanakun, A. Tuantranont   +5 more
semanticscholar   +1 more source

Fabrication of high aspect ratio comb-drive actuator using deep X-ray lithography at Indus-2

, 2014
R. Shukla, V. Dhamgaye, V. Jain, P. Ram Sankar, C. Mukherjee, B. D. Pant, G. Lodha   +6 more
semanticscholar   +1 more source

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Die Naturwissenschaften, 1982
E. Backer, W. Ehrfeld, D. Münchmeyer, H. Betz, A. Heuberger, S. Pongratz, W. Glashauser, H. Michel, R. Siemens   +8 more
semanticscholar   +1 more source

Deep X-Ray Lithography

, 2015
P. Meyer, J. Schulz
semanticscholar   +1 more source