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Microbeam X-ray lithography apparatus for direct production of deep LIGA structures
, 2013B. G. Gol’denberg +3 more
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LIGA process: sensor construction techniques via X-ray lithography
IEEE Technical Digest on Solid-State Sensor and Actuator Workshop, 1988Wolfgang Ehrfeld +4 more
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Soft X-ray lithography of high aspect ratio SU8 submicron structures
, 2008E. Reznikova +4 more
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High speed replication of submicron features on large areas by X-ray lithography
IEEE Transactions on Electron Devices, 1975D. Maydan +5 more
semanticscholar +1 more source
Positive resist for UV and X-ray lithography synthesized through sol–gel chemistry
, 2011L. Brigo +6 more
semanticscholar +1 more source
Submicron polymer structures with X-ray lithography and hot embossing
, 2008T. Mappes +3 more
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Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
, 2006S. Khumpuang +3 more
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Fabrication of assembled micromechanical components via deep X-ray lithography
[1991] Proceedings. IEEE Micro Electro Mechanical Systems, 1991K. Guckel +6 more
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High-speed NMOS circuits made with X-ray lithography and reactive sputter etching
IEEE Electron Device Letters, 1980P. Suciu, E. Fuls, H. Boll
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