Results 271 to 274 of about 1,917,345 (274)

Quality control for deep x-ray lithography (LIGA): a preliminary metrology study

, 2012
P. Meyer, J. Claverley, R. Leach
semanticscholar   +1 more source

Fabrication of Advanced Functional Devices Combining Soft Chemistry with X‐ray Lithography in One Step

Advances in Materials, 2009
P. Falcaro, L. Malfatti, L. Vaccari, H. Amenitsch, B. Marmiroli, G. Grenci, P. Innocenzi   +6 more
semanticscholar   +1 more source

Ultra-deep x-ray lithography of densely packed SU-8 features: I. An SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results

, 2005
C. Becnel, Y. Desta, K. Kelly
semanticscholar   +1 more source

A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)

, 2005
N. Matsuzuka, Y. Hirai, O. Tabata
semanticscholar   +1 more source