Results 51 to 60 of about 113,972 (245)
Droplet-target laser-plasma source for proximity x-ray lithography [PDF]
, 1996 A compact, high-brightness and practically debris-free laser-plasma soft x-ray source for proximity x-ray lithography is described. The target of the source is small liquid fluorocarbon droplets injected into vacuum with a piezoelectrically vibrated ...
Hertz, H. M +2 more
core +1 more source
Systematic efficiency study of line-doubled zone plates [PDF]
, 2017 Line-doubled Fresnel zone plates provide nanoscale, high aspect ratio structures required for efficient high resolution imaging in the multi-keV x-ray range. For the fabrication of such optics a high aspect ratio HSQ resist template is produced by electron-beam lithography and then covered with Ir by atomic layer deposition (ALD).
arxiv +1 more source
Liquid-jet target for laser-plasma soft x-ray generation [PDF]
, 1996 We describe a new liquid-target system for low-debris laser-plasma soft x-ray sources. The system is based on a microscopic liquid jet and is experimentally evaluated for 0.7-1 keV proximity lithography and water-window x-ray microscopy applications ...
Berglund, M +3 more
core +1 more source
Tunable atomic force microscopy bias lithography on electron beam induced carbonaceous platforms
AIP Advances, 2013 Tunable local electrochemical and physical modifications on the carbonaceous platforms are achieved using Atomic force microscope (AFM) bias lithography.
Narendra Kurra
doaj +1 more source
X-ray full field microscopy at 30 KeV [PDF]
, 2014 In our X-ray full field microscopy experiments, we demonstrated a resolution better than 260 nm over the entire field of view of 80 μm x 80 μm at 30 keV.
Greving, I. +8 more
core +2 more sources
X-ray lithography masking [PDF]
, 1998 X-ray masking apparatus includes a frame having a supporting rim surrounding an x-ray transparent region, a thin membrane of hard inorganic x-ray transparent material attached at its periphery to the supporting rim covering the x-ray transparent region ...
Carter, James +3 more
core +1 more source
Microfabrication of Net Shape Zirconia/Alumina Nanocomposite Micro Parts
Nanomaterials, 2018 Recently, there are growing demands in manufacturing of net shape micro parts for wide range of applications due to the increasing interest in miniaturization.
Hany Hassanin +4 more
doaj +1 more source
Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities [PDF]
, 2019 Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases.
Späth, Andreas
core +2 more sources
Evaluation of X-ray/EUV Nanolithography Facility at AS Through Wavefront Propagation Simulations [PDF]
arXiv, 2023 Synchrotron light sources can provide the required spatial coherence, stability and control that is required to support the development of advanced lithography at the extreme ultraviolet and soft X-ray wavelengths that are relevant to current and future fabricating technologies. Here we present an evaluation of the optical performance of the soft X-ray
arxiv
Beilstein Journal of Nanotechnology, 2017 In recent years, block copolymer lithography has emerged as a viable alternative technology for advanced lithography. In chemical-epitaxy-directed self-assembly, the interfacial energy between the substrate and each block copolymer domain plays a key ...
Laura Evangelio +7 more
doaj +1 more source