Abstract:
We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) sche...Show MoreMetadata
Abstract:
We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.
Published in: 2018 IEEE Micro Electro Mechanical Systems (MEMS)
Date of Conference: 21-25 January 2018
Date Added to IEEE Xplore: 26 April 2018
ISBN Information:
Electronic ISSN: 2160-1968