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Overview of nanolithography in Europe | IEEE Conference Publication | IEEE Xplore

Overview of nanolithography in Europe


Abstract:

Summary form only given. Lithography is still the enabler technology, allowing movement along the roadmap, and new developments in this field are often led by European te...Show More

Abstract:

Summary form only given. Lithography is still the enabler technology, allowing movement along the roadmap, and new developments in this field are often led by European teams, whether academic or industrial ones. This paper looks in depth into nanolithography activities in Europe, which in fact cover a broad spectrum of technologies, from electron-beam to extreme UV, including nanoimprint, ion-beam and more innovative concepts.
Date of Conference: 08-12 October 2002
Date Added to IEEE Xplore: 16 December 2002
Print ISBN:0-7803-7440-1
Conference Location: Sinaia, Romania

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