Abstract:
Summary form only given. Lithography is still the enabler technology, allowing movement along the roadmap, and new developments in this field are often led by European te...Show MoreMetadata
Abstract:
Summary form only given. Lithography is still the enabler technology, allowing movement along the roadmap, and new developments in this field are often led by European teams, whether academic or industrial ones. This paper looks in depth into nanolithography activities in Europe, which in fact cover a broad spectrum of technologies, from electron-beam to extreme UV, including nanoimprint, ion-beam and more innovative concepts.
Published in: Proceedings. International Semiconductor Conference
Date of Conference: 08-12 October 2002
Date Added to IEEE Xplore: 16 December 2002
Print ISBN:0-7803-7440-1