本发明提供一种非直线锥形倒锥耦合器结构,包括:一硅衬底;一埋氧层,该埋氧层制作在衬底上,该埋氧层的材料为二氧化硅;一顶层硅,该顶层硅制作在埋氧层上,可以有效的防止光泄漏到衬底中,该顶层硅的一端为条形波导,另一端为倒锥耦合器,其中该倒锥耦合器为渐变的指数型或二次方型结构,该倒锥耦合器的工作波长为1500nm到1600nm,其插入损耗的波动小于0 ...
陈少武, 任光辉
core
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