一种基于差分方法的MEMS器件信号检测电路，包括：一信号源；一跟随器，该跟随器的输入端与信号源的输出端连接，以跟随信号源的变化；一第一器件夹具，该第一器件夹具的一端与跟随器的输出端连接，以提供一路与信号源同相的激励信号；一反相器，该反相器的输入端与信号源的输出端连接，以将信号源的输出信号反相；一第二器件夹具，该第二器件夹具的一端与反相器的输出端连接，以提供一路与信号源反相的激励信号；一跨阻放大器，该跨阻放大器的输入端与第一器件夹具及第二器件夹具的另一端连接 ...
赵永梅 +4 more
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