本发明公开了一种光子晶体可调谐边发射激光器及其制作方法,该方法包括:在半导体材料上制作一二维半导体光子晶体波导;利用低群速度的导波模式使得光波在光子晶体波导内形成共振;调整光子晶体波导最近邻空气孔半径的大小,从而使得导波能带带边的频率位置发生变化;光子晶体的低群速度导波模式的共振频率发生变化;泵浦光子晶体波导不同的位置,不同波长的增益得到增强,获得边发射光子晶体激光的可调谐输出。该光子晶体可调谐边发射激光器包括:一二维薄板结构的光子晶体边发射可调谐激光器;和一用于泵浦所述激光器的泵浦源 ...
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