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Properties of homoepitaxial 4H-SiC and characteristics of Ti/4H-SiC Schottky barrier diodes
SPIE Proceedings, 2008This paper describes the properties of the homoepitaxial 4H-SiC layer, the fabrication and electrical parameters of Ti/4H-SiC Schottky barrier diode (SBD). The 4H-SiC epitaxial layers, grown on the commercially available 8°off-oriented Si-face(0001) single-crystal 4H-SiC wafers, have been performed at 1550~1600°C by using the step controlled epitaxy
G. Chen, Z. Y. Li, S. Bai, P. Han
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Positron Mobility in Semi-Insulating 4H-SiC
Materials Science Forum, 1997Recently, as a result of the observation of positron re-emission from crystalline 6H-SiC, it has been suggested that SiC may be a promising material for a field assisted positron moderator [1]. In this paper an attempt is made to more deeply analyze this potential application of SiC, by presenting data on the low field positron electric field drift in ...
Hu, YF +6 more
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Carrier transport properties in inversion layer of Si-face 4H–SiC MOSFET with nitrided oxide
Japanese Journal of Applied Physics, 2019We propose a method to evaluate the carrier transport properties in the inversion layer of 4H–SiC metal-oxide-semiconductor field-effect transistors (MOSFETs) experimentally.
M. Noguchi +6 more
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IEEE Electron Device Letters, 2019
In this letter, we propose a 4H-SiC-based electrostatic discharge (ESD) protection circuitwith a new structure that has low on-resistance and good high-temperature characteristics while improving the high triggering voltage by applying an improved ...
Kyoung-Il Do +2 more
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In this letter, we propose a 4H-SiC-based electrostatic discharge (ESD) protection circuitwith a new structure that has low on-resistance and good high-temperature characteristics while improving the high triggering voltage by applying an improved ...
Kyoung-Il Do +2 more
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Low frequency noise in 4H-SiC BJTs
Semiconductor Science and Technology, 2004Low frequency noise has been investigated in 4H-SiC BJTs for the first time. In BJTs with the current gain ? ? 10?15 and unity current gain frequency fT of about 1.5 GHz, the corner frequency fc was found to be fc = 2 ? 104 Hz. The value of the coefficient KB, which is the figure of merit for the noise in the region of noise proportional to squared ...
Sergey L. Rumyantsev +3 more
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Monolayer growth modes of Re and Nb on 4H–SiC(0001) and 4H–SiC(0001¯)
Journal of Applied Physics, 2004Auger electron spectroscopy (AES) and secondary electron emission have been used to specify the room temperature monolayer adsorption characteristics of Re and Nb on the basal, polar surfaces of 4H–SiC. Measurement of the secondary electron emission current relates the absorbed crystal current to the change in AES peak-to-peak signal intensities for ...
K. W. Bryant, M. J. Bozack
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Investigations of 3C-SiC inclusions in 4H-SiC epilayers on 4H-SiC single crystal substrates
Journal of Electronic Materials, 1997Synchrotron white beam x-ray topography (SWBXT) and Nomarski optical microscopy (NOM) have been used to characterize 4H-SiC epilayers and to study the character of triangular inclusions therein. 4H-SiC substrates misoriented by a range of angles from (0001), as well as (1 100) and (1120) oriented substrates were used.
Weimin Si +4 more
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Applied Physics Letters, 2019
This paper reports the demonstration of a 600 V 4H-SiC lateral MOSFET with a large current handling capability (10 A). To achieve a high breakdown voltage in a lateral architecture, a REduced SURface Field (RESURF) structure was implemented to alleviate ...
Nick Yun, J. Lynch, Woongje Sung
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This paper reports the demonstration of a 600 V 4H-SiC lateral MOSFET with a large current handling capability (10 A). To achieve a high breakdown voltage in a lateral architecture, a REduced SURface Field (RESURF) structure was implemented to alleviate ...
Nick Yun, J. Lynch, Woongje Sung
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IEEE Transactions on Electron Devices, 2019
In this article, the performance and triggering mechanism of the single-event burnout (SEB) of a 4H-SiC trench-gate (TG) MOSFET structure are evaluated by the 2-D numerical simulations.
Ying Wang +7 more
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In this article, the performance and triggering mechanism of the single-event burnout (SEB) of a 4H-SiC trench-gate (TG) MOSFET structure are evaluated by the 2-D numerical simulations.
Ying Wang +7 more
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Journal of The Electrochemical Society, 2003
4H-SiC homoepitaxial films were grown on 8° off-axis porous 4H-SiC (0001) faces in the temperature range of 1280-1510°C by chemical vapor deposition from bis(trimethylsilyl)methane (BTMSM) precursor. The activation energy for growth was 5.6 kcal/ mol, indicating that the film growth is dominated by the diffusion-limited mechanism.
Jae Kyeong Jeong, Hyeong Joon Kim
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4H-SiC homoepitaxial films were grown on 8° off-axis porous 4H-SiC (0001) faces in the temperature range of 1280-1510°C by chemical vapor deposition from bis(trimethylsilyl)methane (BTMSM) precursor. The activation energy for growth was 5.6 kcal/ mol, indicating that the film growth is dominated by the diffusion-limited mechanism.
Jae Kyeong Jeong, Hyeong Joon Kim
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