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Semiconductor acceleration sensor
The Journal of the Acoustical Society of America, 1998A semiconductor acceleration sensor including a trench provided in a main surface of a semiconductor substrate, the trench having a first inner wall, a second inner wall opposite to the first inner wall, and a third inner wall joining the first and second inner walls.
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Surface Micromachined Acceleration Sensors
2020Micromechatronic sensors have many applications in measuring linear acceleration along one or several axes. For example, accelerometers are widely applied in cars for detecting crashes and for triggering the release of airbags. In mobile devices, they switch the display between landscape and portrait format.
Stephanus Büttgenbach +3 more
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Acoustic particle acceleration sensors
AIP Conference Proceedings, 1996A crossed dipole array provides a directional receiving capability in a relatively small sensor package and is therefore very attractive for many applications in acoustics. Particle velocity measurements on two axes perpendicular to each other are required to provide the dipole signals.
J. B. Franklin, P. J. Barry
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Composite sensor and acceleration sensor
The Journal of the Acoustical Society of America, 2010In an acceleration sensor, a first vibrator is arranged on a surface of a substrate such that the vibrator can vibrate in an X-axis direction. An angular-velocity-detecting vibrator is arranged inside the first vibrator such that the vibrator can be displaced in a Y-axis direction.
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The Journal of the Acoustical Society of America, 2009
An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs bending vibration, as well as an oscillator circuit for oscillating the first piezoelectric vibrating reed; a phase shifting unit for shifting and outputting a
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An acceleration sensor, including: an oscillator unit for outputting an oscillator signal, the oscillator unit including a first piezoelectric vibrating reed having a vibrating arm that performs bending vibration, as well as an oscillator circuit for oscillating the first piezoelectric vibrating reed; a phase shifting unit for shifting and outputting a
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Incline and Acceleration Sensor
SAE Technical Paper Series, 1987<div class="htmlview paragraph">An innovative shock-resistant and accurate incline & acceleration sensor has been developed. This sensor is based on the new concept that either magnetic fluid or a precision steel ball supported by the force of a cylindrical permanent magnet is used as a detecting body, and two coils sense the movement of ...
Takeo Kushida, Nobuyuki Nakajima
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3D Inclinometer and MEMS Acceleration Sensors
2006 IEEE International Symposium on Industrial Electronics, 2006Currently different systems are used to estimate simultaneously linear and angular positions of a mobile frame. This paper presents a novel approach to deduce simultaneously the aforementioned functionalities with only one sensor module. The use of only four MEMS accelerometers represents the main advantage of the proposed system.
Hrant Djambazian +3 more
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Respiratory monitoring with an acceleration sensor
Physics in Medicine and Biology, 2011Respiratory gating radiotherapy is used to irradiate a local area and to reduce normal tissue toxicity. There are certain methods for the detection of tumor motions, for example, using internal markers or an external respiration signal. However, because some of these respiratory monitoring systems require special or expensive equipment, respiratory ...
Tomohiro, Ono +6 more
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Walking Analysis using an Acceleration Sensor
2007 29th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 2007It is important to evaluate walking stability to improve people's health. There are many cases of unstable walking even if people think they are in good health. A small, light acceleration sensor was attached to subjects' center of gravity to measure the acceleration displacement while the subjects were walking.
Yuriko, Tsuruoka, Ryosuke, Shibasaki
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Vibration piezoelectric acceleration sensor
The Journal of the Acoustical Society of America, 2010A vibration piezoelectric acceleration sensor including a pair of diaphragms linearly and oppositely disposed on a frame, a support body supporting the diaphragm, and a holding part holding the support body slidably in a linear direction, and another pair of diaphragms disposed linearly and oppositely crossing the pair of diaphragms detecting ...
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