Results 21 to 30 of about 730,491 (396)
Porous Silicon Carbide for MEMS
Proceedings, 2017 Metal assisted photochemical etching (MAPCE) of 4H Silicon Carbide (SiC) was utilized to generate locally defined porous areas on single crystalline substrates.
Markus Leitgeb +4 more
doaj +1 more source
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Proceedings, 2017 When targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local ...
Martin Fischeneder +3 more
doaj +1 more source
Port-based modeling and optimal control for a new very versatile energy efficient actuator [PDF]
, 2009 In this paper, we analyze in depth the innovative very versatile and energy efficient (V2E2) actuator proposed in Stramigioli et al. (2008). The V2E2 actuator is intended to be used in all kind of robotics and powered prosthetic applications in which ...
Carloni, Raffaella +2 more
core +2 more sources
Static Output Feedback Control of Switched Nonlinear Systems With Actuator Faults
IEEE transactions on fuzzy systems, 2020 This paper is focused on the static output feedback (SOF) control problem for a class of switched nonlinear systems with actuator faults. By means of the Takagi–Sugeno fuzzy model, the switched nonlinear plant is described by a family of switched fuzzy ...
Meng Zhang +3 more
semanticscholar +1 more source
Dynamic Channel Calibration on a Crystal-Free Mote-on-a-Chip
IEEE Access, 2019 The single chip integration of a wireless sensor node would allow for cheap, low-power, dust-size devices. The key to realizing this vision is to eliminate bulky off-chip frequency references such as crystal oscillators or resonators, and their ...
Ioana Suciu +7 more
doaj +1 more source
A novel spherical actuator: Design and control [PDF]
, 1997 The paper describes the design and control of a novel spherical permanent magnet actuator which is capable of two-degrees-freedom and a high specific torque. Based on an analytical actuator model, an optimal design procedure is developed to yield maximum
Howe, D., Jewell, G.W., Wang, J.B.
core +1 more source
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Sensors, 2018 In atomic force microscopes (AFM) a resonantly excited, micro-machined cantilever with a tip is used for sensing surface-related properties. When targeting the integration of AFMs into vacuum environments (e.g., for enhancing the performance of scanning ...
Martin Fischeneder +3 more
doaj +1 more source
Design of a magnetostrictive (MS) actuator [PDF]
, 2008 Several advanced technologies are introduced in automotive applications. Higher energy density and dynamic performance are demanding new and cost effective actuator structures. Magnetostriction (MS), change in shape of materials under the influence of an
A. Grunwald +15 more
core +1 more source
Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors [PDF]
Journal of Sensors and Sensor Systems, 2016 Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept.
J. Bardong +4 more
doaj +1 more source
Proceedings, 2017 This paper investigates the performance of surface acoustic wave (SAW) devices as low power MEMS temperature sensors using reactive sputter deposited aluminum nitride (AlN) and scandium doped aluminum nitride (AlScN) as piezoelectric layers on sapphire ...
Manuel Gillinger +3 more
doaj +1 more source