Results 21 to 30 of about 492,457 (346)
Static Output Feedback Control of Switched Nonlinear Systems With Actuator Faults
IEEE transactions on fuzzy systems, 2020 This paper is focused on the static output feedback (SOF) control problem for a class of switched nonlinear systems with actuator faults. By means of the Takagi–Sugeno fuzzy model, the switched nonlinear plant is described by a family of switched fuzzy ...
Meng Zhang +3 more
semanticscholar +1 more source
Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
Proceedings, 2017 When targeting the integration of atomic force microscopes (AFM) into vacuum environments (e.g., scanning electron microscopes), a tunable Q-factor of the resonating AFM cantilever is a key feature to enable high speed measurements with high local ...
Martin Fischeneder +3 more
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Proceedings, 2018 In preliminary studies it could be shown that single crystalline silicon carbide wafers can be porosified with metal assisted photochemical etching. Furthermore, the generation of porous areas which are locally defined is possible with this method.
Markus Leitgeb +4 more
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CO Detection Investigation at High Temperature by SiC MISFET Metal/Oxide Gas Sensors
Proceedings, 2021 In order to investigate the necessary device improvements for high-temperature CO sensing with SiC metal insulator semiconductor field effect transistor (MISFET)-based chemical gas sensors, devices employing, as the gas-sensitive gate contact, a film of ...
Lida Khajavizadeh +2 more
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Optimized Batch Process for Organic MEMS Devices
Proceedings, 2018 Recently, organic electromechanical transducers have attracted intense scientific and technological interest due to their unique mechanical flexibility and their piezoelectric properties.
Jonas Hafner +4 more
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Novel MEMS Sensor for Detecting Magnetic Particles in Liquids
Proceedings, 2018 We present a novel MEMS sensor for the detection of magnetic particles in liquids, which consists of a microcantilever excited piezoelectrically in resonance and having an integrated planar coil on its free end.
Florian Patocka +3 more
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Proceedings, 2017 This paper investigates the performance of surface acoustic wave (SAW) devices as low power MEMS temperature sensors using reactive sputter deposited aluminum nitride (AlN) and scandium doped aluminum nitride (AlScN) as piezoelectric layers on sapphire ...
Manuel Gillinger +3 more
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Multi-stimuli-responsive programmable biomimetic actuator
Nature Communications, 2019 Untethered small actuators have various applications in multiple fields. However, existing small-scale actuators are very limited in their intractability with their surroundings, respond to only a single type of stimulus and are unable to achieve ...
Yue Dong +10 more
semanticscholar +1 more source
Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors [PDF]
Journal of Sensors and Sensor Systems, 2016 Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept.
J. Bardong +4 more
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Leaf-inspired multiresponsive MXene-based actuator for programmable smart devices
Science Advances, 2019 An unprecedented MXene-based actuator was developed, which mimicked the sophisticated leaf structure and its functionality. Natural leaves, with elaborate architectures and functional components, harvest and convert solar energy into chemical fuels that ...
G. Cai +4 more
semanticscholar +1 more source