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Adaptive E-Nose: Integrating New Gas Sensors for Emerging Applications. [PDF]

open access: yesSensors (Basel)
Gyeltshen N   +6 more
europepmc   +1 more source

MEMS-Based Air Quality Sensor

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
This paper presents a novel sensor array based on MEMS-technology for quantitative measurement of the air quality and a novel model based measurement strategy. The sensor array consists of SnO2 - gas sensors, a porous silicon based humidity sensor and a Pt-temperature sensor monolithically integrated on a single chip.
Mescheder, U.   +8 more
openaire   +1 more source

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