Results 1 to 10 of about 55,925 (298)
Thin-film ultraviolet detector and spectrometer [PDF]
, 1972 Typical metal-insulator-metal detector device is formed on quartz substrate. Base electrode is 3 to 6 nm aluminum layer, overcoated with 3 to 6 nm aluminum oxide or aluminum nitride, and capped with counter electrode of gold, lead, magnesium, or aluminum.
Lewicki, G. W., Maserjian, J.
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Micromachining of AlN and Al2O3 Using Fiber Laser
Micromachines, 2014 We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride.
Florian Preusch +2 more
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Tactile multisensing on flexible aluminum nitride [PDF]
The Analyst, 2012 The integration of a polycrystalline material such as aluminum nitride (AlN) on a flexible substrate allows the realization of elastic tactile sensors showing both piezoelectricity and significant capacitive variation under normal stress. The application of a normal stress on AlN generates deformation of the flexible substrate on which AlN is grown ...
Simona Petroni +6 more
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GROWTH OF ALUMINUM NITRIDE THIN FILMS VIA PEALD WITH VARIOUS PLASMA EXPOSITION DURATIONS
Вестник Северо-Кавказского федерального университета, 2022 Films of aluminum nitride were grown by the method ofplasma-activated ALD. The impact of duration of plasma exposure stage on the growth rate, composition and microstructures was analyzed.
Mikhail Ambartsumov +4 more
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Crystals, 2023 The aim of the study was to investigate the possibility of an effective improvement in performance properties, including corrosion and wear resistance of magnesium AZ91D alloy using a surface engineering solution based on zirconium nitride composite ...
Michał Tacikowski +5 more
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, 1981 A nozzle for use with abrasive and/or corrosive materials is formed of sintered ceramic compositions having high temperature oxidation resistance, high hardness and high abrasion and corrosion resistance.
Pawlik, E. V. +2 more
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Application of the technology of thin films and nanostructured materials in the manufacture of thermally loaded printed circuit boards [PDF]
Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, 2011 The expediency is shown for application of aluminum nitride thin films, which has unique physical and chemical properties, for high heat resistance of the circuit board.
Sakhno E. A. +3 more
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Nature CommunicationsThe demand for high-performance filters in next-generation wireless communication systems underscores the limited electromechanical coupling of aluminum nitride-based film bulk acoustic resonators.
Tingting Yang +15 more
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Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators
Micromachines, 2015 We investigated the aluminum nitride etching process for MEMS resonators. The process is based on Cl2/BCl3/Ar gas chemistry in inductively coupled plasma system. The hard mask of SiO2 is used. The etching rate, selectivity, sidewall angle, bottom surface
Jian Yang +6 more
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New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films [PDF]
, 2006 A new concept of micromachines has been developed for measuring the mechanical properties of thin metallic films. The actuator is a beam undergoing large internal stresses built up during the deposition process.
André, Nicolas +3 more
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