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Synchrotron-radiation-induced anisotropic wet etching of GaAs

Applied Physics Letters, 1999
A room-temperature photoenhanced chemical wet etching process for n-type GaAs using x rays from a synchrotron radiation source is described. HNO3:H2O was used as the etching solution. This process produces smoothly etched surfaces on n-GaAs with a root-mean-square surface roughness of 0.7–2.0 nm, which compares favorably to the unetched surface ...
Qing Ma   +2 more
openaire   +1 more source

Silicon anisotropic wet etching simulation using molecular dynamics

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 2005
The paper describes a new approach of atomic simulation for silicon (Si) anisotropic wet etching using molecular dynamics (MD). The extended Tersoff potential was adopted as a potential function for MD, which was able to handle Si etching reaction with hydrogen (H) and oxygen (O) atoms.
T. Kakinaga   +3 more
openaire   +1 more source

Step-based facet interactions in wet anisotropic etching

CCECE 2003 - Canadian Conference on Electrical and Computer Engineering. Toward a Caring and Humane Technology (Cat. No.03CH37436), 2004
Recent experimental data has shown that a model of wet anisotropic etching of silicon must not be solely based on the crystal features presented to the etchant. The boundaries of under-etched facets, and step interaction at those boundaries, are also likely to play a role in determining etch rates.
I. Stateikina   +3 more
openaire   +1 more source

Tailoring Anisotropic Wetting Properties on Submicrometer-Scale Periodic Grooved Surfaces

Langmuir, 2010
The use of simple plasma treatments and polymer deposition to tailor the anisotropic wetting properties of one-dimensional (1D) submicrometer-scale grooved surfaces, fabricated using interferometric lithography in photoresist polymer films, is reported.
Deying, Xia   +4 more
openaire   +2 more sources

Anisotropic wetting properties on various shape of parallel grooved microstructure

Journal of Colloid and Interface Science, 2015
It has been revealed experimentally that some superhydrophobic surfaces in nature, such as rice leaf, show strong anisotropic wetting behavior. In this work, based on a thermodynamic approach, the effects of profile shape of parallel grooved microstructure on free energy (FE) with its barrier (FEB) and equilibrium contact angle (ECA) with its ...
Lu, Tie, Zhiguang, Guo, Weimin, Liu
openaire   +2 more sources

Directional Drop Transport Achieved on High‐Temperature Anisotropic Wetting Surfaces

Advanced Materials, 2014
The surfaces of ambient-temperature superhydrophilic tilting silicon nanowires (TSNWs) exhibit an anisotropic wetting performance at high temperature and a deposited drop moves directionally on this surface. A vapor film forming beneath the drop after spreading reduces the surface friction and the heat transfer efficiency between the drop and the ...
Chengcheng, Liu   +4 more
openaire   +2 more sources

Anisotropic Wetting Behavior Arising from Superhydrophobic Surfaces: Parallel Grooved Structure

The Journal of Physical Chemistry B, 2008
It has been found experimentally that superhydrophobic surfaces exhibit strong anisotropic wetting behavior. This study reports a simple but robust thermodynamic methodology to investigate the anisotropic superhydrophobic behavior for parallel grooved surfaces.
Wen, Li   +3 more
openaire   +2 more sources

Anisotropic Wetting of Liquids on Finely Grooved Surfaces

The Journal of Adhesion, 1987
Abstract A photolithographically-prepared, parallel-grooved surface on silica has been employed as a model to study the influence of roughness on the spreading equilibrium of liquid drops. The equations generated by Oliver, Huh and Mason for cylindrically shaped drops were extended to account for wetting by liquid crystals.
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Pore wetting in membrane distillation: A comprehensive review

Progress in Materials Science, 2021
Hooman Chamani   +2 more
exaly  

Biomimetic Surface Coatings for Anisotropic Wetting Properties

Inspired by the anisotropic wetting behaviour observed on the integument of the Texas horned lizard, biomimetic functional coatings were designed and fabricated through a novel patterning and growth technique to replicate this phenomenon. Flame spray pyrolysis was first utilised to produce zinc oxide nanoparticles to serve as seeds for subsequent ...
openaire   +1 more source

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