Defect Engineering in Atomic-Layer-Deposited Cerium Oxide. [PDF]
Tschammer R +7 more
europepmc +1 more source
Thin Fluoride Insulators for Improved 2D Transistors: From Deposition Methods to Recent Applications
2D materials hold significant promise for next‐generation electronic and optoelectronic devices, but suitable gate dielectrics are still a challenge. Fluoride insulators, offering inert, dangling‐bond‐free surfaces, have recently emerged as strong candidates. This review covers recent publications on high‐quality fluoride thin‐film deposition and their
Behzad Dadashnia +3 more
wiley +1 more source
Control of Microstructure, Trap Levels, and Trap Distribution in HfO<sub>2</sub> Films Grown by Atomic Layer Deposition. [PDF]
Sharafi SM +3 more
europepmc +1 more source
ALD(Atomic Layer Deposition) Process Technology in the Semiconductor Industry
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A one‐step oblique angle reactive sputtering approach enables simultaneous tuning of bulk and interfacial stoichiometry in a metal oxide/ silicon heterojunction. In case of vanadium oxides, growth angle variation controls the formation of stoichiometric SiO2, ternary SiOx(V) interlayer, and phase purity of vanadium oxide, considerably simplifying the ...
Aparajita Mandal +3 more
wiley +1 more source
Impact of variations in ALD procedure on nanomorphology, protecting properties and chemical stability of thin TiO<sub>2</sub> films. [PDF]
Krýsová H +4 more
europepmc +1 more source
Low Temperature Site‐Specific Pulsed Laser Annealing of MoS2
The application of laser pulses, of extremely short duration, is investigated as a potential new method to modify the atomic structure of ultrathin 2D materials for use in the creation of future electrical devices. The process is efficient, offering a site‐specific functionality, where regions of an electronic device that only requires annealing is ...
Nazar Farid +13 more
wiley +1 more source
Reductive Transformation of ALD TeO<sub>2</sub> into Continuous and Impurity-Free Tellurium Films. [PDF]
Ryu SH +9 more
europepmc +1 more source
ABSTRACT The controlled removal of corrosion products is a persistent challenge in fields ranging from industrial alloy protection to cultural heritage conservation. Achieving high precision and selectivity in subtractive treatments remains difficult because of chemical complexity and structural heterogeneity of the corrosion layers.
Yumei Chai +5 more
wiley +1 more source
Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides. [PDF]
Ha S +6 more
europepmc +1 more source

