Results 291 to 300 of about 30,611 (305)

Mask and reticle protection with atomic layer deposition (ALD)

Photomask Technology 2025
openaire   +1 more source

Semiconductors, Electrochemical Atomic Layer Deposition (E-ALD)

2014
openaire   +1 more source

The properties of plasma-enhanced atomic layer deposition (ALD) ZnO thin films and comparison with thermal ALD

Applied Surface Science, 2011
Hyungjun Kim
exaly  

Influences of metal, non-metal precursors, and substrates on atomic layer deposition processes for the growth of selected functional electronic materials

Coordination Chemistry Reviews, 2013
Sang Woon Lee, Byung Joon Choi, Taeyong Eom   +2 more
exaly  

Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition

Advanced Materials, 2007
Mato Knez, Kornelius Nielsch
exaly  

Unearthing [3‐(Dimethylamino)propyl]aluminium(III) Complexes as Novel Atomic Layer Deposition (ALD) Precursors for Al2O3: Synthesis, Characterization and ALD Process Development

Chemistry - A European Journal, 2017
Lukas Mai, Maximilian Gebhard, Teresa de los Arcos   +2 more
exaly  

ALD: Atomic Layer Deposition, Precise and Conformal Coating for Better Performance

2013
openaire   +1 more source

Dynamic Modeling for the Design and Cyclic Operation of an Atomic Layer Deposition (ALD) Reactor

Processes, 2013
exaly  

Future Directions in Atomic Layer Deposition (ALD) for Battery Production

James Ayodele Oke, Sina Karimzadeh, Peter Ozaveshe Oviroh, Kingsley Ukoba, Patrick Ehi Imoisili, Tien-Chien Jen   +5 more
openaire   +1 more source

Rotary Spatial Plasma Enhanced Atomic Layer Deposition — An enabling manufacturing technology for µm-thick ALD films

2017
Sami Sneck
exaly