Results 271 to 280 of about 4,663,474 (304)
Some of the next articles are maybe not open access.

Ion beam source

2023
MACNEIL JOHN, BENNET PAUL GEORGE
openaire   +1 more source

Technology and Applications of Broad‐Beam Ion Sources Used in Sputtering. Part I. Ion Source Technology

Journal of Vacuum Science and Technology, 1982
J M E Harper, J J Cuomo, H R Kaufman
exaly  

Extraction of H− Beams From a Magnetically Filtered Multicusp Source

Review of Scientific Instruments, 1984
K W Ehlers, R L York, K N Leung
exaly  

Beam source and beam processing apparatus

2006
FUKUDA AKIRA   +5 more
openaire   +2 more sources

High‐Power Fast‐Atom Beam Source and Its Application to Dry Etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992
Fusao Shimokawa
exaly  

An Analysis of Beam-Space Source Localization

IEEE Transactions on Signal Processing, 1993
Xiao-Liang Xu, Kevin M. Buckley
openaire   +1 more source

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