Results 131 to 140 of about 24,076 (144)
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Fabrication and application of a novel freestanding stencil bi-material cantilever structure
SPIE Proceedings, 2004This paper reports a novel freestanding stencil bi-material cantilever structure without sacrificial layer process in detail; the complexity and costs of fabrication process are reduced greatly. This type of microcantilever is made of two material layers (SiNx/Au), which is a 2dimension device, not a 3dimension one.
Weibing Wang +5 more
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Athermal Silicon Ring Resonator with Bi-material Cantilever for Passive Thermal Feedback
CLEO: 2013, 2013We demonstrate a temperature insensitive Si ring resonator by coupling the optical mode to a bi-material cantilever. We show the capability of athermal operation over 14 degrees, which can be further extended through proper optimization.
Biswajeet Guha, Michal Lipson
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Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system
SPIE Proceedings, 2016Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers.
Mei Hui +5 more
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A novel bi-material cantilever IR imaging optical system: from design to implementation
SPIE Proceedings, 2010After introducing the uncooled infrared imaging based on a novel bi-material cantilever, this article emphasize on an optical system of an IR imaging prototype. At first, we select the structure form of optical system. Our optical system prototype consists of an imaging optical component and an optical readout component.
Xuhong Chu +4 more
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Wafer-level vacuum packaging for an optical readout bi-material cantilever infrared FPA
SPIE Proceedings, 2013In this paper, we report the design and fabrication of an uncooled infrared (IR) focal plane array (FPA) on quartz substrate and the wafer-level vacuum packaging for the IR FPA in view of an optical readout method. This FPA is composed of bi-material cantilever array which fabricated by the Micro-Electro Mechanical System (MEMS) technology, and the ...
Shuyu Li, Xiaoxiong Zhou, Xiaomei Yu
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Journal of Micromechanics and Microengineering, 2013
Micro-devices with a bi-material-cantilever (BMC) commonly suffer initial curvature due to the mismatch of residual stress. Traditional corrective methods to reduce the residual stress mismatch generally involve the development of different material deposition recipes.
Liu, Ruiwen +7 more
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Micro-devices with a bi-material-cantilever (BMC) commonly suffer initial curvature due to the mismatch of residual stress. Traditional corrective methods to reduce the residual stress mismatch generally involve the development of different material deposition recipes.
Liu, Ruiwen +7 more
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11th AIAA/ASME Joint Thermophysics and Heat Transfer Conference, 2014
Bi-material microcantilevers are ideally suited sensors for investigating the effects of nanostructuring on thermal transport. We have designed and fabricated high sensitivity bi–material microcantilevers by minimizing their width and thickness dimensions. These cantilevers have been used to resolve sub-picowatt heat flux absorbed on their free end. We
Carlo Canetta, Arvind Narayanaswamy
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Bi-material microcantilevers are ideally suited sensors for investigating the effects of nanostructuring on thermal transport. We have designed and fabricated high sensitivity bi–material microcantilevers by minimizing their width and thickness dimensions. These cantilevers have been used to resolve sub-picowatt heat flux absorbed on their free end. We
Carlo Canetta, Arvind Narayanaswamy
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Microsystem Technologies, 2014
In this paper, the infrared detection system based on the optical readout, based on the thermal bi-material micro-cantilever principle, was designed, and a new detector structure was put forward, including the antireflective layer, infrared absorption layer, supporting arm, and so on.
Changlong Cai, Weiguo Liu
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In this paper, the infrared detection system based on the optical readout, based on the thermal bi-material micro-cantilever principle, was designed, and a new detector structure was put forward, including the antireflective layer, infrared absorption layer, supporting arm, and so on.
Changlong Cai, Weiguo Liu
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ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik, 2012
AbstractA simple, easy‐to‐use and physically meaningful analytical (“mathematical”) model for the prediction of the interfacial shearing stress in, and the maximum bow of, a bi‐material cantilever beam is developed. The beam experiences bending under the action of a lateral concentrated force applied to its free end.
E. Suhir, J. Nicolics
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AbstractA simple, easy‐to‐use and physically meaningful analytical (“mathematical”) model for the prediction of the interfacial shearing stress in, and the maximum bow of, a bi‐material cantilever beam is developed. The beam experiences bending under the action of a lateral concentrated force applied to its free end.
E. Suhir, J. Nicolics
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SPIE Proceedings, 2015
A bi-material cantilever based surface plasmon modulation structure is proposed. It is shown that the mechanical actuation of bi-material cantilever by changing temperature can facilitate amplitude modulation. More specific, the issues of scaling-down and integration of the red, green, and blue are discussed.
Eui-Young Song, Hwi Kim, Byoungho Lee
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A bi-material cantilever based surface plasmon modulation structure is proposed. It is shown that the mechanical actuation of bi-material cantilever by changing temperature can facilitate amplitude modulation. More specific, the issues of scaling-down and integration of the red, green, and blue are discussed.
Eui-Young Song, Hwi Kim, Byoungho Lee
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