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Investigation of dimensions effect on stress of bi-material cantilever beam
Proceedings of the 2011 34th International Spring Seminar on Electronics Technology (ISSE), 2011In this paper we investigate the dimension effect on stress of a set of cantilevers beams which are composed of two different material layers. We studied the induced stress obtained applying a force on the microstructures and its variation function of the residual stress due to fabrication processes.
Rodica Voicu +2 more
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Fabrication and application of a novel freestanding stencil bi-material cantilever structure
SPIE Proceedings, 2004This paper reports a novel freestanding stencil bi-material cantilever structure without sacrificial layer process in detail; the complexity and costs of fabrication process are reduced greatly. This type of microcantilever is made of two material layers (SiNx/Au), which is a 2dimension device, not a 3dimension one.
Weibing Wang +5 more
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Athermal Silicon Ring Resonator with Bi-material Cantilever for Passive Thermal Feedback
CLEO: 2013, 2013We demonstrate a temperature insensitive Si ring resonator by coupling the optical mode to a bi-material cantilever. We show the capability of athermal operation over 14 degrees, which can be further extended through proper optimization.
Biswajeet Guha, Michal Lipson
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ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik, 2012
AbstractA simple, easy‐to‐use and physically meaningful analytical (“mathematical”) model for the prediction of the interfacial shearing stress in, and the maximum bow of, a bi‐material cantilever beam is developed. The beam experiences bending under the action of a lateral concentrated force applied to its free end.
E. Suhir, J. Nicolics
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AbstractA simple, easy‐to‐use and physically meaningful analytical (“mathematical”) model for the prediction of the interfacial shearing stress in, and the maximum bow of, a bi‐material cantilever beam is developed. The beam experiences bending under the action of a lateral concentrated force applied to its free end.
E. Suhir, J. Nicolics
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Terahertz addressed spatial light modulator based on bi-material cantilevers array
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate.
Y. Wen +5 more
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A novel bi-material cantilever IR imaging optical system: from design to implementation
SPIE Proceedings, 2010After introducing the uncooled infrared imaging based on a novel bi-material cantilever, this article emphasize on an optical system of an IR imaging prototype. At first, we select the structure form of optical system. Our optical system prototype consists of an imaging optical component and an optical readout component.
Xuhong Chu +4 more
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Microsystem Technologies, 2014
In this paper, the infrared detection system based on the optical readout, based on the thermal bi-material micro-cantilever principle, was designed, and a new detector structure was put forward, including the antireflective layer, infrared absorption layer, supporting arm, and so on.
Changlong Cai, Weiguo Liu
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In this paper, the infrared detection system based on the optical readout, based on the thermal bi-material micro-cantilever principle, was designed, and a new detector structure was put forward, including the antireflective layer, infrared absorption layer, supporting arm, and so on.
Changlong Cai, Weiguo Liu
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Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system
SPIE Proceedings, 2016Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers.
Mei Hui +5 more
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11th AIAA/ASME Joint Thermophysics and Heat Transfer Conference, 2014
Bi-material microcantilevers are ideally suited sensors for investigating the effects of nanostructuring on thermal transport. We have designed and fabricated high sensitivity bi–material microcantilevers by minimizing their width and thickness dimensions. These cantilevers have been used to resolve sub-picowatt heat flux absorbed on their free end. We
Carlo Canetta, Arvind Narayanaswamy
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Bi-material microcantilevers are ideally suited sensors for investigating the effects of nanostructuring on thermal transport. We have designed and fabricated high sensitivity bi–material microcantilevers by minimizing their width and thickness dimensions. These cantilevers have been used to resolve sub-picowatt heat flux absorbed on their free end. We
Carlo Canetta, Arvind Narayanaswamy
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SPIE Proceedings, 2009
Bi-material cantilever is an important basic structure in MEMS device. Most of the materials with thermal property fit for bi-material are not adhering together steadily. An adhesive layer in between is needed. In this paper, based on the thermal stress and combined deformation in Mechanics of Materials, a model related to the physics properties ...
Xia Zhang +3 more
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Bi-material cantilever is an important basic structure in MEMS device. Most of the materials with thermal property fit for bi-material are not adhering together steadily. An adhesive layer in between is needed. In this paper, based on the thermal stress and combined deformation in Mechanics of Materials, a model related to the physics properties ...
Xia Zhang +3 more
openaire +1 more source