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Thermal Conductance of Bi-Material AFM Cantilevers

Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B, 2008
In this letter, based on the beam theory and the thermal analysis of a bi-material cantilever, we demonstrate that the effective thermal conductance of the cantilever and the temperature at the tip of the cantilever can be determined by measuring the bending of the cantilever in response to two different thermal inputs: power absorbed at the tip and ...
Sheng Shen   +3 more
openaire   +1 more source

Interval Element-Free Method for a Bi-Material Cantilever Beam

Applied Mechanics and Materials, 2013
The interval element-free Galerkin method (IEFGM) is proposed to analyze a bi-material cantilever beam, which is an interfacial mechanics problem including uncertain parameters. Interval method could be applied to study the influences of the uncertain parameters on structural responses.
Yong Wen   +3 more
openaire   +1 more source

Investigation of dimensions effect on stress of bi-material cantilever beam

Proceedings of the 2011 34th International Spring Seminar on Electronics Technology (ISSE), 2011
In this paper we investigate the dimension effect on stress of a set of cantilevers beams which are composed of two different material layers. We studied the induced stress obtained applying a force on the microstructures and its variation function of the residual stress due to fabrication processes.
Rodica Voicu   +2 more
openaire   +1 more source

Fabrication and application of a novel freestanding stencil bi-material cantilever structure

SPIE Proceedings, 2004
This paper reports a novel freestanding stencil bi-material cantilever structure without sacrificial layer process in detail; the complexity and costs of fabrication process are reduced greatly. This type of microcantilever is made of two material layers (SiNx/Au), which is a 2dimension device, not a 3dimension one.
Weibing Wang   +5 more
openaire   +1 more source

Bending of a bi‐material cantilever beam, with consideration of the role of the interfacial shearing stress

ZAMM - Journal of Applied Mathematics and Mechanics / Zeitschrift für Angewandte Mathematik und Mechanik, 2012
AbstractA simple, easy‐to‐use and physically meaningful analytical (“mathematical”) model for the prediction of the interfacial shearing stress in, and the maximum bow of, a bi‐material cantilever beam is developed. The beam experiences bending under the action of a lateral concentrated force applied to its free end.
E. Suhir, J. Nicolics
openaire   +1 more source

Terahertz addressed spatial light modulator based on bi-material cantilevers array

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015
This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate.
Y. Wen   +5 more
openaire   +1 more source

Athermal Silicon Ring Resonator with Bi-material Cantilever for Passive Thermal Feedback

CLEO: 2013, 2013
We demonstrate a temperature insensitive Si ring resonator by coupling the optical mode to a bi-material cantilever. We show the capability of athermal operation over 14 degrees, which can be further extended through proper optimization.
Biswajeet Guha, Michal Lipson
openaire   +1 more source

A novel bi-material cantilever IR imaging optical system: from design to implementation

SPIE Proceedings, 2010
After introducing the uncooled infrared imaging based on a novel bi-material cantilever, this article emphasize on an optical system of an IR imaging prototype. At first, we select the structure form of optical system. Our optical system prototype consists of an imaging optical component and an optical readout component.
Xuhong Chu   +4 more
openaire   +1 more source

Designing of infrared detector based on the bi-material micro-cantilever and its manufacturing process research

Microsystem Technologies, 2014
In this paper, the infrared detection system based on the optical readout, based on the thermal bi-material micro-cantilever principle, was designed, and a new detector structure was put forward, including the antireflective layer, infrared absorption layer, supporting arm, and so on.
Changlong Cai, Weiguo Liu
openaire   +1 more source

Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system

SPIE Proceedings, 2016
Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers.
Mei Hui   +5 more
openaire   +1 more source

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