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SPIE Proceedings, 2009
Bi-material cantilever is an important basic structure in MEMS device. Most of the materials with thermal property fit for bi-material are not adhering together steadily. An adhesive layer in between is needed. In this paper, based on the thermal stress and combined deformation in Mechanics of Materials, a model related to the physics properties ...
Xia Zhang +3 more
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Bi-material cantilever is an important basic structure in MEMS device. Most of the materials with thermal property fit for bi-material are not adhering together steadily. An adhesive layer in between is needed. In this paper, based on the thermal stress and combined deformation in Mechanics of Materials, a model related to the physics properties ...
Xia Zhang +3 more
openaire +1 more source
Dynamic characterization of bi-material cantilevers
2013In this paper, an experimental-theoretical method is proposed to accurately determine the thermal diffusivity, characteristic time constant and layer thicknesses of a bimaterial cantilever using a transient, non-destructive and noncontact measurement. The technique is based on the wellknown optical beam deflection method.
Bijster, R.J.F. +2 more
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