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Advances in Crosstalk Reduction Techniques for Ultrasonic Transducer Arrays. [PDF]
Sensors (Basel)Boujenoui A +4 more
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Bulk acoustic wave RF technology
IEEE Microwave Magazine, 2008In this article, we will provide an overview of BAW filter technology by discussing comparison between BAW and SAW RF filter technologies, working principles of BAW resonator and filter, BAW resonator key performance parameters, comparison between free-standing bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR) technologies, status of ...
Frank Bi, Bradley Barber
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The Journal of the Acoustical Society of America, 2012
Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive ...
Farrokh Ayazi, Houri Johari
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Capacitive bulk acoustic wave x, y and z-axes gyroscopes implemented on (100) and (111) silicon substrates are disclosed. Exemplary gyroscopes comprise a handle substrate, a bulk acoustic wave resonator element supported by the handle substrate, and a plurality of electrodes surrounding and separated from the resonator element by very small capacitive ...
Farrokh Ayazi, Houri Johari
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Thin film bulk acoustic wave filter
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2002Thin film bulk acoustic wave (BAW) resonators (FBAR) are fabricated on a silicon nitride bridge using a ZnO piezolayer on a glass substrate and surface micromachining by standard thin film technology. These resonators exhibit a coupling constant k(t)2 = 7.8% at the first thickness extensional wave mode and are used as impedance elements in a ladder ...
Ellä, Juha +4 more
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Bulk Acoustic Wave Resonators 3D Simulation
2007 International Symposium on Signals, Systems and Electronics, 2007This article discusses numerical simulations of thin film bulk acoustic wave resonators. FBAR simulation with 1D analytical model permits to quickly determine resonator layers thicknesses that correspond to the objective resonant frequency. 3D finite elements method permits to investigate the effect of the electrode shape on the spurious modes that are
Sylvain Giraud +3 more
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Shallow Bulk Acoustic Wave Devices
MTT-S International Microwave Symposium Digest, 2005A brief overview of shallow bulk acoustic wave generation, propagation, and properties is presented. It is shown how the effect is manifested in doubly rotated crystal plates, and how certain features of device performance may be inferred from pre-existing calculations for bulk wave plates.
A. Ballato, T. Lukaszek
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Acoustic bulk wave composite resonators
Applied Physics Letters, 1981This letter reports on a new and unique form of acoustic bulk wave resonator composed of a thin film of ZnO sputtered onto a thin Si membrane supporting structure. The piezoelectric ZnO is used to excite a longitudinal bulk wave which reflects from the free surface of the film and membrane.
K. M. Lakin, J. S. Wang
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Microfabricated Bulk Wave Acoustic Bandgap Device
The Journal of the Acoustical Society of America, 2010A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the ...
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Micromechanical bulk acoustic wave resonator
2002 IEEE Ultrasonics Symposium, 2002. Proceedings., 2003We describe the use of bulk acoustic mode in micromechanical silicon resonators operating at radio frequencies. Based on measured data from the fabricated resonator (f/sub r//spl sim/14 MHz, Q>100 000) we analyze the characteristic impedance and signal levels in such microdevices and compare the values with conventional quartz crystals. We find that
Oja, Aarne +9 more
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Microwave bulk-acoustic-wave reflection-grating resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1988A technique for fabrication of bulk-acoustic-wave (BAW) resonators operating at fundamental frequencies between 1 and 10 GHz is presented. The resonators utilize a reflection grating made by optical holographic methods in iron-doped lithium niobate. Q factors of 30000 at 1 GHz have been demonstrated.
D E, Oates, J Y, Pan
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