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Improving manufacturability of bulk acoustic wave and surface acoustic wave devices

2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2011
Bulk acoustic wave (BAW/FBAR) or surface acoustic wave (SAW) technologies are widely used in making filters for wireless applications [1]. While it is no longer a great challenge to make reactively sputtered piezoelectric aluminum nitride (AlN) films suitable for BAW applications [3] or to make a standard SAW filter, there are critical devices that ...
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Narrow band bulk acoustic wave filters

IEEE Ultrasonics Symposium, 2004, 2005
Bulk acoustic wave (BAW) filters are competing successfully in the range of 800 MHz to 10 GHz with SAW filters. USPCS and UMTS filters require a bandwidth of 60 MHz at approximately 2 GHz (fractional BW /spl Delta/f/f/spl ap/3%). This can be realized by optimum design and high quality piezoelectric AlN which allows figure of merit, k/sup 2/Q, values of
H.P. Loebl   +7 more
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Thin film bulk acoustic wave resonator

The Journal of the Acoustical Society of America, 2005
The present invention is intended to provide a thin film bulk acoustic wave resonator, which has a resonant excitation portion free from damage caused by etching, a high electromechanical coupling coefficient k t 2 and a high quality coefficient Q value, and to provide a thin film bulk acoustic wave resonator having a plurality of different resonant
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Micromachined bulk acoustical-wave RF filters

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004., 2005
We present the performance of RF filters based on thin film bulk acoustical resonator (FBAR) technology for wireless communication applications. The filter is fabricated using surface micromachining processes and is hermetically sealed using wafer-level packaging with solder bumps on each electrical terminal, ready for flip-chip assembly.
null Kan Wang, P. Bradley, M. Gat
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Surface skimming bulk acoustic wave accelerometer

The Journal of the Acoustical Society of America, 1988
An accelerometer includes a cantilevered pieozelectric beam mounted to a surface inside a fluid filled chassis with a proof mass attached to the beam's free end. Surface skimming bulk wave delay lines are mounted on opposing major surfaces of the beam and are responsive to strain induced therein by acceleration of the proof mass.
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High-temperature bulk acoustic wave sensors

Measurement Science and Technology, 2010
Piezoelectric crystals like langasite (La3Ga5SiO14, LGS) and gallium orthophosphate (GaPO4) exhibit piezoelectrically excited bulk acoustic waves at temperatures of up to at least 1450 °C and 900 °C, respectively. Consequently, resonant sensors based on those materials enable new sensing approaches.
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Bulk acoustic wave coupled resonator filters

Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234), 2003
Coupled resonator filters (CRF) are a new form of bulk acoustic wave device that involves the vertical stacking of resonators. In that regard, the CRF can be thought of as a variation on the better known stacked crystal filter (SCF). However, the CRF is actually somewhat more analogous to the monolithic crystal filter (MCF) that was a mainstay in ...
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Investigation of Shallow Bulk Acoustic Waves

The Journal of the Acoustical Society of America, 1983
Abstract : This final report summarizes the most important results of the Investigation of Shallow Bulk Acoustic Waves (SBAW) program. This program was conceived on the principle that SBAW technology could lead to devices that are superior to those presently available for frequency filtering and control.
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Shallow Bulk Acoustic Wave Filters

1978 Ultrasonics Symposium, 1978
K.H. Yen, K.F. Lau, R.S. Kagiwada
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